Special Section on Nanopatterning

Direct, parallel nanopatterning of silicon carbide by laser nanosphere lithography

[+] Author Affiliations
Arvind Battula

The University of Texas at Austin, Department of Mechanical Engineering, Austin, Texas 78712

Senthil Theppakuttai

The University of Texas at Austin, Department of Mechanical Engineering, Austin, Texas 78712

Shaochen Chen

The University of Texas at Austin, Department of Mechanical Engineering, Austin, Texas 78712

J. Micro/Nanolith. MEMS MOEMS. 5(1), 011009 (February 22, 2006). doi:10.1117/1.2177288
History: Received December 01, 2004; Revised April 25, 2005; Accepted July 01, 2005; Published February 22, 2006
Text Size: A A A

A technique to create nanopatterns on hard-to-machine bulk silicon carbide (SiC) with a laser beam is presented. A monolayer of silica (SiO2) spheres of 1.76-μm and 640-nm diameter are deposited on the SiC substrate and then irradiated with an Nd:YAG laser of 355 and 532nm. The principle of optical near-field enhancement between the spheres and substrate when irradiated by a laser beam is used for obtaining the nanofeatures. The features are then characterized using a scanning electron microscope and an atomic force microscope. The diameter of the features thus obtained is around 150to450nm and the depths vary from 70to220nm.

Figures in this Article
© 2006 Society of Photo-Optical Instrumentation Engineers

Citation

Arvind Battula ; Senthil Theppakuttai and Shaochen Chen
"Direct, parallel nanopatterning of silicon carbide by laser nanosphere lithography", J. Micro/Nanolith. MEMS MOEMS. 5(1), 011009 (February 22, 2006). ; http://dx.doi.org/10.1117/1.2177288


Tables

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.