Articles

Optical characterization of diffractive optical elements replicated in polymers

[+] Author Affiliations
Sigitas Tamulevicius

Kaunas University of Technology, Institute of Physical Electronics, Savanoriu 271, Kaunas 50131, Lithuania

Asta Guobiene

Kaunas University of Technology, Institute of Physical Electronics, Savanoriu 271, Kaunas 50131, Lithuania

Giedrius Janusas

Kaunas University of Technology, International Studies Center, Mickeviciaus 37, Kaunas 44244, Lithuania and Kaunas University of Technology, Department of Applied Mathematics, Studentu 50, Kaunas 51368, Lithuania

Arvydas Palevicius

Kaunas University of Technology, International Studies Center, Mickeviciaus 37, Kaunas 44244, Lithuania

Vytautas Ostasevicius

Kaunas University of Technology, International Studies Center, Mickeviciaus 37, Kaunas 44244, Lithuania

Mindaugas Andrulevicius

Kaunas University of Technology, Institute of Physical Electronics, Savanoriu 271, Kaunas 50131, Lithuania

J. Micro/Nanolith. MEMS MOEMS. 5(1), 013004 (February 08, 2006). doi:10.1117/1.2170098
History: Received June 07, 2005; Revised October 06, 2005; Accepted October 08, 2005; Published February 08, 2006
Text Size: A A A

We present an optical laser-based method to visualize replication of microperiodic profile structures in polymers. Diffraction efficiency of diffraction gratings (originally produced in silicon, quartz glass, and in replicated polymer substrates) is measured experimentally and simulated using linear dimensions of gratings, or their replica defined by atomic force microscopy (AFM). Diffraction efficiency of the periodic structure is used to test the surface relief formation during the combined ion etching of crystalline Si (100) and replication of this structure using UV light hardening and hot embossing. The main experimental results are compared with computer simulations where the standard program (PCGrate-SX6.0) is employed. Angular dependence of relative efficiency (RE) appears a versatile tool to analyze the process of origination and replication of diffraction grating in a micrometer range. Both the shape of the grating and linear dimensions can be reconstructed by comparing experimental values of relative efficiency with the simulation results. Examples of hot embossing of different periods of diffraction gratings to the Al/polymethyl methacrylate (PMMA) on polyethylene terephthalate (PET) illustrate vitality of such approach.

Figures in this Article
© 2006 Society of Photo-Optical Instrumentation Engineers

Citation

Sigitas Tamulevicius ; Asta Guobiene ; Giedrius Janusas ; Arvydas Palevicius ; Vytautas Ostasevicius, et al.
"Optical characterization of diffractive optical elements replicated in polymers", J. Micro/Nanolith. MEMS MOEMS. 5(1), 013004 (February 08, 2006). ; http://dx.doi.org/10.1117/1.2170098


Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

PubMed Articles
Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.