Special Section on Bio-MEMS and Microfluidics

Novel microfabrication approach of embedded SU8™ fluidic networks for cell transport on chips

[+] Author Affiliations
Alison Gracias

University at Albany, State University of New York, College of Nanoscale Science and Engineering, 255 Fuller Road, Albany, New York 12203

Xiaojun Feng

University at Albany, State University of New York, College of Nanoscale Science and Engineering, 255 Fuller Road, Albany, New York 12203 and University at Albany, State University of New York, Department of Biological Sciences, 1400 Washington Avenue, Albany, New York 12222

Bai Xu

University at Albany, State University of New York, College of Nanoscale Science and Engineering, 255 Fuller Road, Albany, New York 12203

James Castracane

University at Albany, State University of New York, College of Nanoscale Science and Engineering, 255 Fuller Road, Albany, New York 12203

J. Micro/Nanolith. MEMS MOEMS. 5(2), 021102 (May 24, 2006). doi:10.1117/1.2200674
History: Received August 04, 2005; Revised December 22, 2005; Accepted December 30, 2005; Published May 24, 2006
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We focus on the development and fabrication of SU8-based microchannel networks, which can be integrated into microdevices for fast drug delivery and cell transport on chips. Instead of using sacrificial materials or wafer bonding, a new simplified fabrication method is developed. Single- and double-layered SU8 channels on silicon substrates are successfully achieved by using this new method, as well as integration of these SU8 channels with microelectrode arrays. A series of cell transport experiments is also successfully performed on these devices. This new fabrication approach and the resulting cell transport experiments are discussed in detail.

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© 2006 Society of Photo-Optical Instrumentation Engineers

Citation

Alison Gracias ; Xiaojun Feng ; Bai Xu and James Castracane
"Novel microfabrication approach of embedded SU8™ fluidic networks for cell transport on chips", J. Micro/Nanolith. MEMS MOEMS. 5(2), 021102 (May 24, 2006). ; http://dx.doi.org/10.1117/1.2200674


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