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Design of an electrostatic rotary comb actuator

[+] Author Affiliations
J. Andrew Yeh

National Tsing Hua University, Institute of Microelectronics Engineering and Institute of Micro-Electro-Mechanical Systems, Taiwan

Jing-Yi Huang

National Tsing Hua University, Institute of Micro-Electro-Mechanical Systems, Taiwan

Chi-Nan Chen

National Tsing Hua University, Institute of Microelectronics Engineering, Taiwan

Chung-Yuen Hui

Cornell University, Department of Theoretical and Applied Mechanics, Ithaca, New York

J. Micro/Nanolith. MEMS MOEMS. 5(2), 023008 (May 10, 2006). doi:10.1117/1.2198532
History: Received February 07, 2005; Revised September 19, 2005; Revised January 16, 2006; Accepted January 26, 2006; Published May 10, 2006
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We present an experimentally verified governing equation, which provides designers some physical insights of rotary comb actuated microsystems. The degree of rotation depends on a single dimensionless parameter, including electric moment applied, central ring radius, and radial spring constant. Radial spring constants, which differ from rotational spring constants typically used in other models, can be independently obtained using radial forces from simulation only. The rotation angles and the resonant frequencies are determined to be linearly proportional to the ring radius power of 0.16 and 0.08, respectively. As the rings become larger, both the angular spring constants and the resonant frequencies increase.

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© 2006 Society of Photo-Optical Instrumentation Engineers

Citation

J. Andrew Yeh ; Jing-Yi Huang ; Chi-Nan Chen and Chung-Yuen Hui
"Design of an electrostatic rotary comb actuator", J. Micro/Nanolith. MEMS MOEMS. 5(2), 023008 (May 10, 2006). ; http://dx.doi.org/10.1117/1.2198532


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