Design of an electrostatic rotary comb actuator

Jer-Liang Andrew Yeh; Jing-Yi Huang; Chi-Nan Chen; Chung-Yuen Hui

doi:10.1117/1.2198532

1 April 2006 Design of an electrostatic rotary comb actuator

Jer-Liang Andrew Yeh, Jing-Yi Huang, Chi-Nan Chen, Chung-Yuen Hui

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 5, Issue 2, 023008 (April 2006). https://doi.org/10.1117/1.2198532

Abstract

We present an experimentally verified governing equation, which provides designers some physical insights of rotary comb actuated microsystems. The degree of rotation depends on a single dimensionless parameter, including electric moment applied, central ring radius, and radial spring constant. Radial spring constants, which differ from rotational spring constants typically used in other models, can be independently obtained using radial forces from simulation only. The rotation angles and the resonant frequencies are determined to be linearly proportional to the ring radius power of -0.16 and 0.08, respectively. As the rings become larger, both the angular spring constants and the resonant frequencies increase.

©(2006) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Jer-Liang Andrew Yeh, Jing-Yi Huang, Chi-Nan Chen, and Chung-Yuen Hui "Design of an electrostatic rotary comb actuator," Journal of Micro/Nanolithography, MEMS, and MOEMS 5(2), 023008 (1 April 2006). https://doi.org/10.1117/1.2198532

Published: 1 April 2006

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