Articles

Fabrication and optical packaging of an integrated Mach-Zehnder interferometer on top of a movable micromirror

[+] Author Affiliations
Łukasz Nieradko

Institute Franche-Comté Electronique Mecanique Thermique et Optique – Sciences et Technologies, Département d'Optique P.-M. Duffieux, 16 Route de Gray, 25030 Besançon, Cedex, France

Christophe Gorecki

Institute Franche-Comté Electronique Mecanique Thermique et Optique – Sciences et Technologies, Département d'Optique P.-M. Duffieux, 16 Route de Gray, 25030 Besançon, Cedex, France

Michał Józwik

Institute Franche-Comté Electronique Mecanique Thermique et Optique – Sciences et Technologies, Département d'Optique P.-M. Duffieux, 16 Route de Gray, 25030 Besançon, Cedex, France

Andrei Sabac

Institute Franche-Comté Electronique Mecanique Thermique et Optique – Sciences et Technologies, Département d'Optique P.-M. Duffieux, 16 Route de Gray, 25030 Besançon, Cedex, France

Rolf Hoffmann

Chemnitz University of Technology, Reichenhainer Strasse 70, D-09126 Chemnitz, Germany

Andreas Bertz

Chemnitz University of Technology, Reichenhainer Strasse 70, D-09126 Chemnitz, Germany

J. Micro/Nanolith. MEMS MOEMS. 5(2), 023009 (May 19, 2006). doi:10.1117/1.2203366
History: Received November 29, 2004; Revised May 18, 2005; Accepted January 30, 2006; Published May 19, 2006
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There is a great need for techniques that will permit the evaluation of the micromechanical state of micro-electro-mechanical system (MEMS) devices, at all steps of manufacturing, with respect to material properties, as well as of lifetime and for monitoring mechanical performances of MEMS actuators. We propose a new approach, based on integrated optical read-out using a Mach-Zehnder interferometer (MZI), monolithically integrated on the top of an electrostatically rotatable micromirror loaded with the sensing arm of MZI. The working principle of MZI read-out is based on the local change of the effective refractive index of guided waves of MZI, induced by strains of the deformable structure. A single-mode buried channel waveguide based on the silica/silicon oxinitride/silica structure is used, presenting optical attenuation of 0.6dBcm. The coupling of the standard optical fiber to the waveguide is based on the V-groove technique, supplemented by micromechanical sawing of the silicon substrate. For TE polarization, the set of obtained parameters is a coupling efficiency of about 55% with a horizontal misalignment of ±0.5μm, a vertical misalignment of ±0.7μm, and angular precision of ±0.2deg on <110> directions of the silicon substrate.

© 2006 Society of Photo-Optical Instrumentation Engineers

Citation

Łukasz Nieradko ; Christophe Gorecki ; Michał Józwik ; Andrei Sabac ; Rolf Hoffmann, et al.
"Fabrication and optical packaging of an integrated Mach-Zehnder interferometer on top of a movable micromirror", J. Micro/Nanolith. MEMS MOEMS. 5(2), 023009 (May 19, 2006). ; http://dx.doi.org/10.1117/1.2203366


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