Articles

Design and analysis of an intensity modulated micro-opto-electro-mechanical accelerometer based on nonuniform cantilever beam proof mass

[+] Author Affiliations
Jagannath Nayak

Research Center Imarat, Inertial Systems Group, Hyderabad, India 500-069

Talabattula Srinivas

Indian Institute of Science, Department of Electrical Communication Engineering, Applied Photonics Laboratory, Bangalore, India 560012

Anant Selvarajan

Indian Institute of Science, Department of Electrical Communication Engineering, Applied Photonics Laboratory, Bangalore, India 560012

Darbha V. K. Sastry

Research Center Imarat, Inertial Systems Group, Hyderabad, India 500-069

J. Micro/Nanolith. MEMS MOEMS. 5(4), 043012 (December 08, 2006). doi:10.1117/1.2397045
History: Received April 17, 2006; Revised August 16, 2006; Accepted August 18, 2006; Published December 08, 2006
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Micro-opto-electro-mechanical (MOEM) accelerometers using principle of optical coupling between two waveguide structures is proposed. It consists of an antiresonant reflecting optical waveguide structure combined with a cantilever beam. Under acceleration, the output waveguide optical power changes, which is a function of acceleration. The mathematical model of the mechanical sensing element in terms of proof mass, damping, and spring constant is formulated. Here, different aspects such as beam deflection, bending stress, and breakdown acceleration are incorporated into the formulation. Based on the analysis, the optimum mechanical structure for intensity modulated MOEM accelerometers are designed. We report for a typical uniform cantiliver beam of type I (3mm×3mm×0.38μm) accelerometer, mechanical sensitivity of 0.15μmg, minimum detectable acceleration of 4.7μgHz at an optimum power of 500μW, range of ±25g, a bandwidth of 1.59kHz, breakdown acceleration of 5.1×104g and cross-axis sensitivity of 0.001%. The results in the case of nonuinform beam cantiliver accelerations are sensitivity of 2.15μmg, minimum detectable acceleration of 0.27μgHz range of ±1.8g, bandwidth of 0.411kHz, breakdown acceleration of 2987g and cross-axis sensitivity of 0.001%.

© 2006 Society of Photo-Optical Instrumentation Engineers

Citation

Jagannath Nayak ; Talabattula Srinivas ; Anant Selvarajan and Darbha V. K. Sastry
"Design and analysis of an intensity modulated micro-opto-electro-mechanical accelerometer based on nonuniform cantilever beam proof mass", J. Micro/Nanolith. MEMS MOEMS. 5(4), 043012 (December 08, 2006). ; http://dx.doi.org/10.1117/1.2397045


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