Articles

Acousto-optic phase-mask emulation

[+] Author Affiliations
Bryan C. Bolt

University of North Carolina at Charlotte, Department of Electrical Engineering, 9201 University City Boulevard, Charlotte, North Carolina 28223

Paul C. Allen

KLA-Tencor Corporation, 160 Rio Robles, San Jose, California 95134

J. Micro/Nanolith. MEMS MOEMS. 6(3), 033005 (August 31, 2007). doi:10.1117/1.2777158
History: Received February 10, 2007; Revised April 26, 2007; Accepted May 02, 2007; Published August 31, 2007
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Emulation of phase-shift mask (PSM) imaging techniques through the use of acousto-optic interaction, rather than fixed photomasks, is demonstrated. The phasefront and irradiance profile of a uniform illumination beam are manipulated acousto-optically in two dimensions by controlling the phase and amplitude of the radio-frequency (RF) signals, which drive the acousto-optic modulators used as the basis for these investigations. Enhancements in aerial image resolution and edge slope are shown by contrasting image quality for nonphase-shifted features against features patterned using acousto-optic emulation of alternating phase-shift mask, attenuated phase-shift mask, and chromeless phase-shift mask imaging techniques. A demonstration of vortex via patterning is also shown to highlight the versatility of this technique in creating complex two dimensional patterns. An overview of the experimental method and hardware is presented along with the results.

© 2007 Society of Photo-Optical Instrumentation Engineers

Citation

Bryan C. Bolt and Paul C. Allen
"Acousto-optic phase-mask emulation", J. Micro/Nanolith. MEMS MOEMS. 6(3), 033005 (August 31, 2007). ; http://dx.doi.org/10.1117/1.2777158


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