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Flip bonding with SU-8 for hybrid AlxGa1−xAs-polysilicon MEMs-tunable filter

[+] Author Affiliations
Edward Ochoa

Air Force Institute of Technology, Wright-Patterson Air Force Base, Ohio 45433 Edward.Ochoa@earthlink.net

LaVern Starman

Air Force Institute of Technology, Wright-Patterson Air Force Base, Ohio 45433 Edward.Ochoa@earthlink.net

Robert Bedford

Air Force Research Laboratory Sensors Directorate, Wright-Patterson Air Force Base, Ohio 45433

Thomas Nelson

Air Force Research Laboratory Sensors Directorate, Wright-Patterson Air Force Base, Ohio 45433

James Ehret

Air Force Research Laboratory Materials and Manufacturing Directorate, Wright-Patterson Air Force Base, Ohio 45433

Michael Harvey

United States Air Force Space and Missile Systems Center, Peterson Air Force Base, Colorado 45433

Travis Anderson

University of Florida, Gainesville, Florida 32611

Fan Ren

University of Florida, Gainesville, Florida 32611

J. Micro/Nanolith. MEMS MOEMS. 6(3), 033007 (July 30, 2007). doi:10.1117/1.2767326
History: Received January 23, 2007; Revised May 16, 2007; Accepted May 29, 2007; Published July 30, 2007
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We report the influence of bonding temperature on SU-8 to SU-8 bonding and report fabrication of a hybrid microelectromechanical-tunable filter (MEM-TF) using SU-8 bond pads. We demonstrate use of 2-μm-thick 50×50-μm2 SU-8 bond pads to attach 4.92-μm-thick 250×250-μm2Al0.4Ga0.6As-GaAs distributed Bragg reflectors (DBR) to polysilicon MUMPs® piston actuators. Advantages of this process include compatibility with hydrofluoric-acid-release chemistry, low-temperature/low-pressure bonding, simple bond-pad photolithography, 57% flip-bonded DBR yield, and 30% electrostatically actuatable hybrid MEM-TF yield.

Figures in this Article
© 2007 Society of Photo-Optical Instrumentation Engineers

Citation

Edward Ochoa ; LaVern Starman ; Robert Bedford ; Thomas Nelson ; James Ehret, et al.
"Flip bonding with SU-8 for hybrid AlxGa1−xAs-polysilicon MEMs-tunable filter", J. Micro/Nanolith. MEMS MOEMS. 6(3), 033007 (July 30, 2007). ; http://dx.doi.org/10.1117/1.2767326


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