Articles

Micro angular rate sensor design and nonlinear dynamics

[+] Author Affiliations
Nan-Chyuan Tsai

National Cheng Kung University, Department of Mechanical Engineering, Tainan 70101, Taiwan

Chung-Yang Sue

National Cheng Kung University, Department of Mechanical Engineering, Tainan 70101, Taiwan

Chih-Che Lin

National Cheng Kung University, Department of Mechanical Engineering, Tainan 70101, Taiwan

J. Micro/Nanolith. MEMS MOEMS. 6(3), 033008 (August 31, 2007). doi:10.1117/1.2778645
History: Received December 07, 2006; Revised April 26, 2007; Accepted May 16, 2007; Published August 31, 2007
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We present an innovative micro gyroscope that is capable of detecting three-dimensional (3-D) angular motions. The motion of each sensing element is, by mechanical design, restricted to move in a direction orthogonal to each other such that measurements by high-resolution capacitors with signal processing circuits are decoupled and precisely represent, to some extent, angular velocity components in three axes. In order to ensure better repeatability and more reliability, the suspension flexures and stiffness are studied such that the stress of the proposed micro gyroscope is reduced, but the stroke of angular displacements is increased. Owing to the complicated geometry of the suspension flexures, the finite element method (FEM) is employed to obtain more exact stiffness value and compared with theoretical analysis. The dynamic model of the proposed gyroscope is established to include nonlinear terms and gyroscopic effects. The entire micro device can be produced merely by surface micromachining and wet etching such that the mass production cost has been considered at the design stage but the resolution, bandwidth, and decoupling capability of tri-axis detection are expected to be enhanced.

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© 2007 Society of Photo-Optical Instrumentation Engineers

Citation

Nan-Chyuan Tsai ; Chung-Yang Sue and Chih-Che Lin
"Micro angular rate sensor design and nonlinear dynamics", J. Micro/Nanolith. MEMS MOEMS. 6(3), 033008 (August 31, 2007). ; http://dx.doi.org/10.1117/1.2778645


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