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Optical designs of grazing incidence collector for extreme ultraviolet lithography

[+] Author Affiliations
Fabio E. Zocchi, Enrico Benedetti

Media Lario Technologies, Località Pascolo, 23842 Bosisio, Parini (LC), Italy

J. Micro/Nanolith. MEMS MOEMS. 6(4), 043002 (November 20, 2007). doi:10.1117/1.2811949
History: Received February 06, 2007; Revised May 18, 2007; Accepted July 11, 2007; Published November 20, 2007
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Two designs of grazing incidence collectors for extreme ultraviolet (EUV) lithography are described as alternative solutions to the type-I Wolter configuration. The main purposes of the designs are the improvement of collection efficiency and the increase in flexibility with which the design can be adapted and adjusted to the boundary specifications set by the source and the illuminator. With reference to a specific scenario, examples of these designs and their performances are presented, discussed, and compared to what can be achieved with a Wolter collector. In this scenario, one of the designs offers the possibility to achieve large collection efficiency with a limited number of mirrors, as opposed to the Wolter case where high values of the collection efficiency are possible, provided the number of mirrors is increased.

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© 2007 Society of Photo-Optical Instrumentation Engineers

Citation

Fabio E. Zocchi and Enrico Benedetti
"Optical designs of grazing incidence collector for extreme ultraviolet lithography", J. Micro/Nanolith. MEMS MOEMS. 6(4), 043002 (November 20, 2007). ; http://dx.doi.org/10.1117/1.2811949


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