Articles

Modeling and optimization of debris mitigation systems for laser and discharge-produced plasma in extreme ultraviolet lithography devices

[+] Author Affiliations
Valeryi Sizyuk, Ahmed Hassanein

Argonne National Laboratory, 9700 South Cass Avenue, Building 308, Argonne, Illinois 60439

Vivek Bakshi

SEMATECH Corporation, 2706 Montopolis Drive, Austin, Texas 78741

J. Micro/Nanolith. MEMS MOEMS. 6(4), 043003 (November 02, 2007). doi:10.1117/1.2804128
History: Received December 15, 2006; Revised July 16, 2007; Accepted July 26, 2007; Published November 02, 2007
Text Size: A A A

Physical models are developed to investigate the following conditions relevant to discharge-produced plasma (DPP) devices under development for extreme ultraviolet (EUV) lithography: gaseous jet propagation in the chamber, removal of neutral particles with a gaseous jet, and deviation of charged particles with a magnetic field. Several geometries of the mitigation systems are considered for removing debris during the EUV lithographic process. The design of a mitigation system is proposed and simulated with the computer models. The behavior of Xe, Li, and Sn debris in Ar and He jets is simulated by using the high energy interaction with general heterogeneous target systems (HEIGHTS) integrated package. Final energy and local distributions are calculated using experimental debris data from current EUV facilities.

Figures in this Article
© 2007 Society of Photo-Optical Instrumentation Engineers

Citation

Valeryi Sizyuk ; Ahmed Hassanein and Vivek Bakshi
"Modeling and optimization of debris mitigation systems for laser and discharge-produced plasma in extreme ultraviolet lithography devices", J. Micro/Nanolith. MEMS MOEMS. 6(4), 043003 (November 02, 2007). ; http://dx.doi.org/10.1117/1.2804128


Tables

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Journal Articles

Related Book Chapters

Topic Collections

PubMed Articles
Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.