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Parameter extraction from simple electrical measurements on surface micromachined cantilevers

[+] Author Affiliations
Somashekara Bhat

Indian Institute of Technology Madras, Microelectronics and MEMS Laboratory, Department of Electrical Engineering, Chennai 600036, India

Enakshi Bhattacharya

Indian Institute of Technology Madras, Microelectronics and MEMS Laboratory, Department of Electrical Engineering, Chennai 600036, India

J. Micro/Nanolith. MEMS MOEMS. 6(4), 043013 (October 10, 2007). doi:10.1117/1.2794291
History: Received March 16, 2007; Revised June 18, 2007; Accepted June 26, 2007; Published October 10, 2007
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In surface micromachined structures, many parameters like geometry and Young’s modulus depend on the process steps and need to be measured for accurate prediction of their functionality. This work discusses simple electrical measurement techniques on surface micromachined cantilever beams to determine Young’s modulus, the gap between the beam and the substrate, and the thickness of a deposited aluminum layer on the beam. Cantilevers are ubiquitous in most microelectromechanical system (MEMS) sensors and actuators, and hence are ideal test structures. Pull-in, and a novel resonance frequency measurement based on the pull-in technique, are done on oxide anchored doped polysilicon beams at the wafer level, and some of the device and material properties are extracted from these measurements. The extracted values are compared with those determined from established methods like vibrometry and surface profiler measurements, and show good agreement. Since the measurements are all electrical, they can be part of standardized testing and are also suitable for packaged devices.

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© 2007 Society of Photo-Optical Instrumentation Engineers

Citation

Somashekara Bhat and Enakshi Bhattacharya
"Parameter extraction from simple electrical measurements on surface micromachined cantilevers", J. Micro/Nanolith. MEMS MOEMS. 6(4), 043013 (October 10, 2007). ; http://dx.doi.org/10.1117/1.2794291


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