Special Section on Silicon-Based MOEMS and Their Applications

Ultracompact laser projection systems based on two-dimensional resonant microscanning mirrors

[+] Author Affiliations
Michael Scholles

Fraunhofer Institute for Photonic Microsystems, Maria-Reiche-Strasse 2, 01109 Dresden, Germany

Andreas Bräuer

Fraunhofer Institute for Applied Optics and Precision Engineering, Albert-Einstein-Strasse 7, 07745 Jena, Germany

Klaus Frommhagen

Fraunhofer Institute for Photonic Microsystems, Maria-Reiche-Strasse 2, 01109 Dresden, Germany

Christian Gerwig

Fraunhofer Institute for Photonic Microsystems, Maria-Reiche-Strasse 2, 01109 Dresden, Germany

Hubert Lakner

Fraunhofer Institute for Photonic Microsystems, Maria-Reiche-Strasse 2, 01109 Dresden, Germany

Harald Schenk

Fraunhofer Institute for Photonic Microsystems, Maria-Reiche-Strasse 2, 01109 Dresden, Germany

Markus Schwarzenberg

Fraunhofer Institute for Photonic Microsystems, Maria-Reiche-Strasse 2, 01109 Dresden, Germany

J. Micro/Nanolith. MEMS MOEMS. 7(2), 021001 (April 29, 2008). doi:10.1117/1.2911643
History: Received August 02, 2007; Revised December 03, 2007; Accepted December 14, 2007; Published April 29, 2008
Text Size: A A A

Recently, there has been substantial progress in the development of ultracompact image projection systems. This has been enabled by the availability of electrically modulated laser sources for all three elementary colors and a 2D resonant microscanning mirror as a micro-opto-electro-mechanical system (MOEMS) device for light deflection. The laser beam formed by collimator optics is directed onto the micro-scanning mirror. Given the movement of the mirror, the laser beam scans the entire image area. By driving the mirror and electrically modulating the intensity of the laser beam in a synchronous manner, a projection of images can be achieved. In this contribution, we present the theoretical background of the projection system as well as the latest achievements in system design. Both monochrome and full-color systems are currently available. The latter uses a separate laser bank as an RGB light source, which is coupled with a projection head. For monochrome red systems, the laser diode can be integrated into the projection head as well, whose volume can be reduced to 15×7×5mm. All systems have video graphics array (VGA) (640×480pixels) resolution and operate with 8-bit color depth per pixel and 50 frames per second.

Figures in this Article
© 2008 Society of Photo-Optical Instrumentation Engineers

Citation

Michael Scholles ; Andreas Bräuer ; Klaus Frommhagen ; Christian Gerwig ; Hubert Lakner, et al.
"Ultracompact laser projection systems based on two-dimensional resonant microscanning mirrors", J. Micro/Nanolith. MEMS MOEMS. 7(2), 021001 (April 29, 2008). ; http://dx.doi.org/10.1117/1.2911643


Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.