Special Section on Silicon-Based MOEMS and Their Applications

Development and evolution of MOEMS technology in variable optical attenuators

[+] Author Affiliations
Chengkuo Lee

National University of Singapore, Department of Electrical & Computer Engineering, 4 Engineering Drive 3, 117576 Singapore and Institute of Microelectronics, Agency for Science, Technology and Research (A*STAR), 11 Science Park Road, Singapore Science Park II, Singapore 117685

J. Andrew Yeh

National Tsing-Hua University, Institute of Nanoengineering and Microsystems, 101, Section 2, Kuang Fu Road, Hsinchu, Taiwan, 30055

J. Micro/Nanolith. MEMS MOEMS. 7(2), 021003 (July 01, 2008). doi:10.1117/1.2949816
History: Received August 07, 2007; Revised March 12, 2008; Accepted March 27, 2008; Published July 01, 2008
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Optical microelectromechanical systems (MEMS) technology or micro-optoelectromechanical systems (MOEMS) technology has proven to be an enabling technology for many components of optical networking applications. Due to their widespread applications, MEMS variable optical attenuators (VOA) have been one of the most attractive MEMS-based key devices in the optical communication market. Micromachined shutters and refractive mirrors assembled with 2D and 3D optics are the subjects of tremendous research activity. We conduct a comprehensive literature survey with respect to technologies such as fabrication processes, optical designs, actuators, and systems. Apparently, MEMS VOA technology is still evolving into a mature technology step by step. MEMS VOA technology is not only the cornerstone to support future optical communication technology, but also the best example for understanding the evolution of MOEMS technology and the commercialization of MOEMS devices.

© 2008 Society of Photo-Optical Instrumentation Engineers

Citation

Chengkuo Lee and J. Andrew Yeh
"Development and evolution of MOEMS technology in variable optical attenuators", J. Micro/Nanolith. MEMS MOEMS. 7(2), 021003 (July 01, 2008). ; http://dx.doi.org/10.1117/1.2949816


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