Special Section on Silicon-Based MOEMS and Their Applications

Tunable infrared detector with integrated micromachined Fabry-Perot filter

[+] Author Affiliations
Norbert Neumann

InfraTec GmbH, Gostritzer Strasse 61-63, 01217 Dresden, Germany

Martin Ebermann

InfraTec GmbH, Gostritzer Strasse 61-63, 01217 Dresden, Germany

Steffen Kurth

Fraunhofer Institute for Reliability and Microintegration, Department Multi Device Integration, Reichenhainer Strasse 88, 09126 Chemnitz, Germany

Karla Hiller

Chemnitz University of Technology, Center for Microtechnologies, 09107 Chemnitz, Germany

J. Micro/Nanolith. MEMS MOEMS. 7(2), 021004 (April 30, 2008). doi:10.1117/1.2909206
History: Received July 17, 2007; Revised September 26, 2007; Accepted October 17, 2007; Published April 30, 2008
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We report the design, fabrication, and test results of a tunable pyroelectric detector with an integrated micromachined Fabry-Perot (FP) filter for gas analysis in the mid-wave infrared (MWIR). The new approach is based on a bulk micromachined Fabry-Perot interferometer with an air cavity, which is electrostatically tuned. Various types of movable reflectors and spring configurations are fabricated to determine the optimum solution with respect to maximum tuning range, low gravity influence on center wavelength, and suitable filter bandwidth. Short and long cavity filters are designed for the spectral ranges of 3 to 4.3μm and 3.7 to 5.0μm, respectively. The tunable filter is arranged on top of a current mode pyroelectric detector with a flat spectral response. It is shown that the main challenge is to achieve a high finesse in spite of nonperfect parallelism, mirror curvature, and the additional phase shift caused by the Bragg reflectors.

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© 2008 Society of Photo-Optical Instrumentation Engineers

Citation

Norbert Neumann ; Martin Ebermann ; Steffen Kurth and Karla Hiller
"Tunable infrared detector with integrated micromachined Fabry-Perot filter", J. Micro/Nanolith. MEMS MOEMS. 7(2), 021004 (April 30, 2008). ; http://dx.doi.org/10.1117/1.2909206


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