Special Section on Silicon-Based MOEMS and Their Applications

Translatory MEMS actuators for optical path length modulation in miniaturized Fourier-transform infrared spectrometers

[+] Author Affiliations
Thilo Sandner

Fraunhofer Institute for Photonic Microsystems, Maria-Reiche-Strasse 2, D-01109 Dresden, Germany

Christian Drabe

Fraunhofer Institute for Photonic Microsystems, Maria-Reiche-Strasse 2, D-01109 Dresden, Germany

Harald Schenk

Fraunhofer Institute for Photonic Microsystems, Maria-Reiche-Strasse 2, D-01109 Dresden, Germany

Andreas Kenda

Carinthian Tech Research AG Europastrasse 4/1 A-9524 Villach, Austria

Werner Scherf

Carinthian Tech Research AG Europastrasse 4/1 A-9524 Villach, Austria

J. Micro/Nanolith. MEMS MOEMS. 7(2), 021006 (July 01, 2008). doi:10.1117/1.2945227
History: Received March 28, 2008; Revised May 02, 2008; Accepted May 12, 2008; Published July 01, 2008
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We present several types of translatory MOEMS actuators developed for fast optical-path-length modulation [e.g., in confocal microscopes or Fourier-transform infrared (FTIR) spectrometers] and their application on miniaturized FTIR spectrometers capable of performing time-resolved measurements from the near infrared to the mid infrared. The MOEMS devices are manufactured in a complementary metal oxide semi conductor compatible silicon-on-insulator process. They are electrostatically resonant, driven using in-plane comb drives. A first translatory 5-kHz MOEMS device is used in a first prototype of a miniaturized MOEMS-based FTIR spectrometer where the MOEMS actuator replaces the macroscopic mirror drive, enabling a miniaturized, robust, and low-cost FTIR system. The mirror plate of 1.65mm2 is suspended by bending springs. Due to the resonant operation, a 200-μm stroke can be achieved with low voltages (<40V) at an ambient pressure below 500Pa. Consequently, this yields a spectral resolution of 25cm1 and an acquisition time of 200μs per spectrum. In addition, we present a novel MOEMS device with an increased mirror aperture of 7.1mm2 and pantograph-like mirror suspension enabling up to a 500-μm stroke. This device is specifically optimized for miniaturized FTIR spectrometers to enable an improved spectral resolution of 10cm1 and a signal-to-noise ratio of >1000:1.

© 2008 Society of Photo-Optical Instrumentation Engineers

Citation

Thilo Sandner ; Christian Drabe ; Harald Schenk ; Andreas Kenda and Werner Scherf
"Translatory MEMS actuators for optical path length modulation in miniaturized Fourier-transform infrared spectrometers", J. Micro/Nanolith. MEMS MOEMS. 7(2), 021006 (July 01, 2008). ; http://dx.doi.org/10.1117/1.2945227


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