Special Section on Silicon-Based MOEMS and Their Applications

Silicon grating microfabrication for long-range displacement sensor

[+] Author Affiliations
Ali Khiat

Université de Technologie de Compiègne, Laboratoire Roberval, FRE UTC-CNRS 2833, France

Frédéric Lamarque

Université de Technologie de Compiègne, Laboratoire Roberval, FRE UTC-CNRS 2833, France

Christine Prelle

Université de Technologie de Compiègne, Laboratoire Roberval, FRE UTC-CNRS 2833, France

Anurak Phataralaoha

Technische Universität Braunschweig, Institut für Mikrotechnik, Braunschweig, Germany

Jan Dittmer

Technische Universität Braunschweig, Institut für Mikrotechnik, Braunschweig, Germany

Thomas Krah

Technische Universität Braunschweig, Institut für Mikrotechnik, Braunschweig, Germany

Monika Leester-Schädel

Technische Universität Braunschweig, Institut für Mikrotechnik, Braunschweig, Germany

Stephanus Büttgenbach

Technische Universität Braunschweig, Institut für Mikrotechnik, Braunschweig, Germany

J. Micro/Nanolith. MEMS MOEMS. 7(2), 021007 (May 12, 2008). doi:10.1117/1.2909459
History: Received August 01, 2007; Revised November 08, 2007; Accepted November 12, 2007; Published May 12, 2008
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Silicon gratings are fabricated using micromachining techniques. The gratings are used with fiber optic probes to measure high-resolution and long-range linear displacements. Different parameters of the fabrication process such as the etching solution, the concentration of the etchant, and the temperature are optimized to achieve a mirror-like surface quality of the grating steps. For each parameter set, the resulting roughness and flatness are analyzed and discussed. Finally, linear displacement measurements are performed with the optimized grating as a component of a long-range fiber optic sensor. A resolution better than 34nm and a measurement range up to 8.7mm are obtained.

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© 2008 Society of Photo-Optical Instrumentation Engineers

Citation

Ali Khiat ; Frédéric Lamarque ; Christine Prelle ; Anurak Phataralaoha ; Jan Dittmer, et al.
"Silicon grating microfabrication for long-range displacement sensor", J. Micro/Nanolith. MEMS MOEMS. 7(2), 021007 (May 12, 2008). ; http://dx.doi.org/10.1117/1.2909459


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