Special Section on Silicon-Based MOEMS and Their Applications

Requirements of MEMS membrane mirrors for focus adjustment and aberration correction in endoscopic confocal and optical coherence tomography imaging instruments

[+] Author Affiliations
David L. Dickensheets

Montana State University, Department of Electrical and Computer Engineering, 530 Cobleigh Hall, Bozeman, Montana 59717

J. Micro/Nanolith. MEMS MOEMS. 7(2), 021008 (Apr 01, 2008). doi:10.1117/1.2911024
History: Received June 15, 2007; Revised September 04, 2007; Accepted September 11, 2007
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We explore the use of deformable membrane mirrors for primary focus control and spherical aberration correction in confocal microscopes and optical coherence tomography instruments that are miniaturized for in-situ imaging. Membrane requirements to achieve specified system performance are explored for both high and low numerical aperture regimes. Examples of both confocal imaging and focus-tracking optical coherence tomography using varifocus silicon nitride MEMS mirrors are presented. It is envisioned that future instruments with enhanced-stroke adaptive membrane mirrors will provide high fidelity microscopy and optical coherence tomography for diagnostic imaging of intact, living tissue.

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© 2008 Society of Photo-Optical Instrumentation Engineers

Citation

David L. Dickensheets
"Requirements of MEMS membrane mirrors for focus adjustment and aberration correction in endoscopic confocal and optical coherence tomography imaging instruments", J. Micro/Nanolith. MEMS MOEMS. 7(2), 021008 (Apr 01, 2008). ; http://dx.doi.org/10.1117/1.2911024


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