Special Section on Silicon-Based MOEMS and Their Applications

Uniform tilt-angle micromirror array for multiobject spectroscopy

[+] Author Affiliations
Severin Waldis

University of Neuchâtel, Institute of Microtechnology, Rue Jaquet-Droz 1, CH-2000 Neuchâtel, Switzerland

Frederic Zamkotsian

Laboratoire d’Astrophysique de Marseille, 2 place Leverrier, F-13248 Marseille Cedex 4, France

Pierre-Andre Clerc

University of Neuchâtel, Institute of Microtechnology, Rue Jaquet-Droz 1, CH-2000 Neuchâtel, Switzerland

Wilfried Noell

University of Neuchâtel, Institute of Microtechnology, Rue Jaquet-Droz 1, CH-2000 Neuchâtel, Switzerland

Michael Zickar

University of Neuchâtel, Institute of Microtechnology, Rue Jaquet-Droz 1, CH-2000 Neuchâtel, Switzerland

Patrick Lanzoni

Laboratoire d’Astrophysique de Marseille, 2 place Leverrier, F-13248 Marseille Cedex 4, France

Nico de Rooij

University of Neuchâtel, Institute of Microtechnology, Rue Jaquet-Droz 1, CH-2000 Neuchâtel, Switzerland

J. Micro/Nanolith. MEMS MOEMS. 7(2), 021014 (June 05, 2008). doi:10.1117/1.2920338
History: Received August 08, 2007; Revised December 20, 2007; Accepted January 02, 2008; Published June 05, 2008
Text Size: A A A

We report on micromirror arrays being developed for use as reflective slit masks in multiobject spectrographs for astronomical applications. The micromirrors are etched in bulk single crystal silicon, whereas cantilever-type suspension is realized by surface micromachining. One micromirror element is 100×200μm in size. A system of multiple landing beams is developed, which electrostatically clamps the mirror at a well-defined tilt angle when actuated. The mechanical tilt angle obtained is 20deg at a pull-in voltage of 90V. Measurements with an optical profiler show that the tilt angle of the actuated mirror is stable with a precision of one arc minute over a range of 15V. This electrostatic clamping system provides uniform tilt angle over the whole array: the maximum deviation measured between any two mirrors is as low as one arc minute. The surface quality of the mirrors in the actuated state is better than 10nm peak-to-valley and the local roughness is around 1-nm rms. Cryogenic testing shows that the micromirror device is functional at temperatures below 100K.

Figures in this Article
© 2008 Society of Photo-Optical Instrumentation Engineers

Citation

Severin Waldis ; Frederic Zamkotsian ; Pierre-Andre Clerc ; Wilfried Noell ; Michael Zickar, et al.
"Uniform tilt-angle micromirror array for multiobject spectroscopy", J. Micro/Nanolith. MEMS MOEMS. 7(2), 021014 (June 05, 2008). ; http://dx.doi.org/10.1117/1.2920338


Tables

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Journal Articles

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.