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Predictive modeling of thermoelastic energy dissipation in tunable MEMS mirrors

[+] Author Affiliations
Houwen Tang

University of Denver, Department of Electrical and Computer Engineering, Denver, Colorado 80208

Yun-Bo Yi

University of Denver, Department of Mechanical and Materials Engineering, Denver, Colorado 80208

Mohammad A. Matin

University of Denver, Department of Electrical and Computer Engineering, Denver, Colorado 80208

J. Micro/Nanolith. MEMS MOEMS. 7(2), 023004 (April 29, 2008). doi:10.1117/1.2909274
History: Received August 31, 2007; Revised January 25, 2008; Accepted February 11, 2008; Published April 29, 2008
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The design of microstructures with a high quality factor (Q value) is of significant importance in many microelectromechanical system (MEMS) applications. Thermoelastic damping can cause an intrinsic energy loss that affects the Q value of high-frequency resonance in those devices such as MEMS mirrors. We deal with the simulation and analysis of thermoelastic damping of MEMS mirrors based on the finite element method. Four designs of MEMS mirrors with different geometric shapes are studied. In each model, the dynamic responses of the system subjected to thermoelastic damping are compared to those of the undamped modes. Then we present a systematic parametric study on both the resonant frequency and the Q value as functions of various representative parameters. These results are useful for early prediction of thermoelastic energy loss, not only restricted to the MEMS mirrors but also applicable in more general MEMS resonators and filters design.

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© 2008 Society of Photo-Optical Instrumentation Engineers

Citation

Houwen Tang ; Yun-Bo Yi and Mohammad A. Matin
"Predictive modeling of thermoelastic energy dissipation in tunable MEMS mirrors", J. Micro/Nanolith. MEMS MOEMS. 7(2), 023004 (April 29, 2008). ; http://dx.doi.org/10.1117/1.2909274


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