Articles

Fabrication of quartz mold with submicrometer features based on laser-assisted contact transfer method

[+] Author Affiliations
Yung-Chun Lee

National Cheng Kung University, Department of Mechanical Engineering and Center for Micro/Nano Science and Technology, Tainan, Taiwan

Chun-Hsiang Chen

National Cheng Kung University, Department of Mechanical Engineering, Tainan, Taiwan

Cheng-Yu Chiu

National Cheng Kung University, Department of Mechanical Engineering, Tainan, Taiwan

Fuh-Yu Chang

Industrial Technology Research Institute, Mechanical and Systems Research Laboratory, Hsinchu, Taiwan

J. Micro/Nanolith. MEMS MOEMS. 7(3), 033006 (September 04, 2008). doi:10.1117/1.2970146
History: Received March 20, 2008; Revised June 19, 2008; Accepted June 27, 2008; Published September 04, 2008
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We report a simple method for fabricating quartz molds with submicrometer- and nanoscaled surface structures. It utilizes an excimer laser as the energy source and a roller-type contact-printing setup for directly transferring a patterned metallic thin film from a silicon mold to a quartz substrate. The transferred metallic patterns are subsequently used as an etching mask for dry etching on the quartz plate. Experiments have been carried out to determine the optimal parameters for successful pattern transformation. Experimental results on fabricating quartz molds are presented, and potential applications of this innovative pattern transformation method are addressed.

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© 2008 Society of Photo-Optical Instrumentation Engineers

Citation

Yung-Chun Lee ; Chun-Hsiang Chen ; Cheng-Yu Chiu and Fuh-Yu Chang
"Fabrication of quartz mold with submicrometer features based on laser-assisted contact transfer method", J. Micro/Nanolith. MEMS MOEMS. 7(3), 033006 (September 04, 2008). ; http://dx.doi.org/10.1117/1.2970146


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