Optical properties of Teflon® AF amorphous fluoropolymers

Min K. Yang; Roger H. French; Edward W. Tokarsky

doi:10.1117/1.2965541

1 July 2008 Optical properties of Teflon^® AF amorphous fluoropolymers

Min K. Yang, Roger H. French, Edward W. Tokarsky

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 7, Issue 3, 033010 (July 2008). https://doi.org/10.1117/1.2965541

Abstract

The optical properties of three grades of Teflon^® AF—AF1300, AF1601, and AF2400—were investigated using a J.A. Woollam VUV-VASE spectroscopic ellipsometry system. The refractive indices for each grade were obtained from multiple measurements with different film thicknesses on Si substrates. The absorbances of Teflon^® AF films were determined by measuring the transmission intensity of Teflon^® AF films on CaF₂ substrates. In addition to the refractive index and absorbance per cm (base 10), the extinction coefficient (k), and absorption coefficient (α) per cm (base e), Urbach parameters of absorption edge position and edge width, and two-pole Sellmeier parameters were determined for the three grades of Teflon^® AF. We found that the optical properties of the three grades of Teflon^® AF varied systematically with the AF TFE/PDD composition. The indices of refraction, extinction coefficient (k), absorption coefficient (α), and absorbance (A) increased, as did the TFE content, while the PDD content decreased. In addition, the Urbach edge position moved to a longer wavelength, and the Urbach edge width became wider.

©(2008) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Min K. Yang, Roger H. French, and Edward W. Tokarsky "Optical properties of Teflon^® AF amorphous fluoropolymers," Journal of Micro/Nanolithography, MEMS, and MOEMS 7(3), 033010 (1 July 2008). https://doi.org/10.1117/1.2965541

Published: 1 July 2008

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