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Novel two-dimensional micromachined accelerometer based on thermocapillary heat transfer

[+] Author Affiliations
Ke-Min Liao

National Tsing Hua University, Department of Power Mechanical Engineering, Hsinchu City 30013, Taiwan

Rongshun Chen

National Tsing Hua University, Department of Power Mechanical Engineering, Hsinchu City 30013, Taiwan

J. Micro/Nanolith. MEMS MOEMS. 7(3), 033011 (July 28, 2008). doi:10.1117/1.2959849
History: Received September 25, 2007; Revised March 30, 2008; Accepted April 10, 2008; Published July 28, 2008
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We report a novel prototype of a two-dimensional micromachined accelerometer based on thermocapillary heat transfer. The only moving element in this accelerometer is a thermal bubble generated by vaporizing the working liquid in the microchamber. The accelerometer consists of two key components, a heating resistor for creating symmetrical temperature profiles and two pairs of temperature detectors placed symmetrically and orthogonally to each other. The prototype devices demonstrate that a sensitivity of 1.5°Cg for an operating power of 60mW can be realized. The frequency response of the accelerometer containing deionized water is 200Hz, and the corresponding noise equivalent acceleration is 1mgHz12.

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© 2008 Society of Photo-Optical Instrumentation Engineers

Citation

Ke-Min Liao and Rongshun Chen
"Novel two-dimensional micromachined accelerometer based on thermocapillary heat transfer", J. Micro/Nanolith. MEMS MOEMS. 7(3), 033011 (July 28, 2008). ; http://dx.doi.org/10.1117/1.2959849


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