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New approach of fabrication and dispensing of micromachined cesium vapor cell

[+] Author Affiliations
Lukasz Nieradko

UMR CNRS 6174, Institute Franche-Comté Electronique Mecanique Thermique et Optique–Sciences et Technologies, 16 Route de Gray, 25030 Besançon Cedex, France

Christophe Gorecki

UMR CNRS 6174, Institute Franche-Comté Electronique Mecanique Thermique et Optique–Sciences et Technologies, 16 Route de Gray, 25030 Besançon Cedex, France

Adel Douahi, Jean Charles Beugnot

UMR CNRS 6174, Institute Franche-Comté Electronique Mecanique Thermique et Optique–Sciences et Technologies, 16 Route de Gray, 25030 Besançon Cedex, France

Vincent Giordano

UMR CNRS 6174, Institute Franche-Comté Electronique Mecanique Thermique et Optique–Sciences et Technologies, 16 Route de Gray, 25030 Besançon Cedex, France

Jan Dziuban

Wroclaw University of Technology, Faculty of Microsystem Electronics and Photonics, 11/17 Janiszewskiego St., 50-372 Wroclaw, Poland

Marco Moraja

SAES Getters, Viale Italia 77, 20020 Lainate (Milan), Italy

J. Micro/Nanolith. MEMS MOEMS. 7(3), 033013 (August 06, 2008). doi:10.1117/1.2964288
History: Received August 18, 2007; Revised March 16, 2008; Accepted April 14, 2008; Published August 06, 2008
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We describe the fabrication of wafer-scale alkali vapor cells based on silicon micromachining and anodic bonding. The principle of the proposed micromachined alkali cell is based on an extremely compact sealed vacuum cavity of a few cubic millimeters containing caesium vapors, illuminated by a high-frequency modulated laser beam. The alkali cells are formed by sealing an etched silicon wafer between two glass wafers. The technique of cell filling involves the use of an alkali dispenser. The activation of cesium vapors is made by local heating of the dispenser below temperature range causing degradations of cesium vapor purity. Thus, the procedure avoids negative effects of cesium chemistry on the quality of cell surfaces and sealing procedure. To demonstrate the clock operation, cesium absorption as well as coherent population trapping resonance was measured in the cells.

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© 2008 Society of Photo-Optical Instrumentation Engineers

Citation

Lukasz Nieradko ; Christophe Gorecki ; Adel Douahi ; Vincent Giordano ; Jean Charles Beugnot, et al.
"New approach of fabrication and dispensing of micromachined cesium vapor cell", J. Micro/Nanolith. MEMS MOEMS. 7(3), 033013 (August 06, 2008). ; http://dx.doi.org/10.1117/1.2964288


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