Articles

Visual-servoing of a six-degree-of-freedom robotic manipulator for automated microassembly task execution

[+] Author Affiliations
Yasser H. Anis

Arizona State University, The Biodesign Institute, 1001 South McAllister Avenue, Tempe, Arizona 85287

James K. Mills

University of Toronto, Department of Mechanical and Industrial Engineering, 5 King’s College Road, Toronto, Ontario M5S 3G8, Canada

William L. Cleghorn

University of Toronto, Department of Mechanical and Industrial Engineering, 5 King’s College Road, Toronto, Ontario M5S 3G8, Canada

J. Micro/Nanolith. MEMS MOEMS. 7(3), 033017 (September 03, 2008). doi:10.1117/1.2970145
History: Received November 22, 2007; Revised June 18, 2008; Accepted June 27, 2008; Published September 03, 2008
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This paper introduces a visual-servoing system used in the automation of microelectromechanical system microassembly. In the proposed system, small microparts, 20μm wide and 2μm thick, are automatically grasped using a passive compliant microgripper in a first step toward achieving complete automation of the microassembly process. A fuzzy logic controller uses vision-based position and force feedback to correct the microgripper and micropart alignment and to guide the system toward achievement of a successful grasp. A depth-from-defocus depth estimation technique is used to properly align the micropart in the same horizontal plane as the microgripper. The performance of the system is investigated experimentally, and experimental results are presented.

© 2008 Society of Photo-Optical Instrumentation Engineers

Citation

Yasser H. Anis ; James K. Mills and William L. Cleghorn
"Visual-servoing of a six-degree-of-freedom robotic manipulator for automated microassembly task execution", J. Micro/Nanolith. MEMS MOEMS. 7(3), 033017 (September 03, 2008). ; http://dx.doi.org/10.1117/1.2970145


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