Articles

Slow scanning electromagnetic scanner for laser display

[+] Author Affiliations
Hee-Moon Jeong

Samsung Electrics Company, Ltd., Core Printing Component Lab, Digital Media R&D Center, Digital Media Business, 416, Meatan-3 Dong, Yeongtong-Gu, Suwon-City, Gyeonggi-Do, Korea 443-742

Yong-Hwa Park

Samsung Electrics Company, Ltd., Material & Device Lab, MEMS & Packaging Group, P. O. Box 111, Sunwon, Korea 440-600

Yong-Chul Cho

Samsung Electrics Company, Ltd., Material & Device Lab, MEMS & Packaging Group, P. O. Box 111, Sunwon, Korea 440-600

Junsik Hwang

Samsung Electrics Company, Ltd., Material & Device Lab, MEMS & Packaging Group, P. O. Box 111, Sunwon, Korea 440-600

Seok-Mo Chang

Samsung Electrics Company, Ltd., Core Printing Component Lab, Digital Media R&D Center, Digital Media Business, 416, Meatan-3 Dong, Yeongtong-Gu, Suwon-City, Gyeonggi-Do, Korea 443-742

Seok-Jin Kang

Samsung Electrics Company, Ltd., Core Printing Component Lab, Digital Media R&D Center, Digital Media Business, 416, Meatan-3 Dong, Yeongtong-Gu, Suwon-City, Gyeonggi-Do, Korea 443-742

Hyun-Ku Jeong

Samsung Electrics Company, Ltd., Digital Printing Division, Advanced R&D Group, 416, Meatan-3 Dong, Yeongtong-Gu, Suwon-City, Gyeonggi-Do, Korea 443-742

Jun O Kim

Samsung Electrics Company, Ltd., Core Printing Component Lab, Digital Media R&D Center, Digital Media Business, 416, Meatan-3 Dong, Yeongtong-Gu, Suwon-City, Gyeonggi-Do, Korea 443-742

Jin-Ho Lee

Samsung Electrics Company, Ltd., Core Printing Component Lab, Digital Media R&D Center, Digital Media Business, 416, Meatan-3 Dong, Yeongtong-Gu, Suwon-City, Gyeonggi-Do, Korea 443-742

J. Micro/Nanolith. MEMS MOEMS. 7(4), 043003 (December 03, 2008). doi:10.1117/1.3033210
History: Received July 10, 2008; Revised September 03, 2008; Accepted October 14, 2008; Published December 03, 2008
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A small sized, low power consuming, shock proven optical scanner with a capacitive comb-type rotational sensor for the application of mobile projection display is designed, fabricated, and characterized. To get a 2-D video image, the present device horizontally scans a vertical line image made through a line-type diffractive spatial optical modulator. To minimize, device size as well as power consumption, the mirror surface is placed on the opposite side of the coil actuator. To prevent thermal deformation of the mirror, the mirror is partially connected to the center point of the coil actuator. To be shock proof, mechanical stoppers are constructed in the device. The scanner is fabricated from two silicon wafers and one glass wafer using bulk micromachining technology. The packaged scanner consists of the scanner chip, a pair of magnets, yoke rim, and base plate. The fabricated package size is 9.2×10×3mm(0.28cc) and the mirror size is 3×1.5mm. The scanner chip receives no damage under the shock test with an impact of 2000G in 1ms. In the case of a full optical scan angle of 30deg at 120-Hz driving frequency, linearity, repeatability, and power consumption are measured at 98%, 0.013deg, and 60mW, respectively, which are suitable for mobile display applications.

© 2008 Society of Photo-Optical Instrumentation Engineers

Citation

Hee-Moon Jeong ; Yong-Hwa Park ; Yong-Chul Cho ; Junsik Hwang ; Seok-Mo Chang, et al.
"Slow scanning electromagnetic scanner for laser display", J. Micro/Nanolith. MEMS MOEMS. 7(4), 043003 (December 03, 2008). ; http://dx.doi.org/10.1117/1.3033210


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