Articles

In-plane rotary comb-drive actuator for a variable optical attenuator

[+] Author Affiliations
Max Ti-Kuang Hou

National United University, Department of Mechanical Engineering, 1, Lienda, Miaoli 36003, Taiwan

Jing-Yi Huang

National Tsing Hua University, Institute of Nanoengineering and Microsystems, 101, Section 2, Kuang-Fu Road, Hsinchu 30013, Taiwan

Shiue-Shr Jiang

National Tsing Hua University, Institute of Nanoengineering and Microsystems, 101, Section 2, Kuang-Fu Road, Hsinchu 30013, Taiwan

J. Andrew Yeh

National Tsing Hua University, Institute of Nanoengineering and Microsystems, 101, Section 2, Kuang-Fu Road, Hsinchu 30013, Taiwan

J. Micro/Nanolith. MEMS MOEMS. 7(4), 043015 (November 06, 2008). doi:10.1117/1.3013547
History: Received November 11, 2007; Revised August 03, 2008; Accepted August 11, 2008; Published November 06, 2008
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An in-plane rotary comb drive actuator was designed for variable optical attenuators (VOAs) that achieved large attenuation with fast response at low driving voltage. Actuator performance was improved by using a higher density of comb fingers for a smaller moment of inertia, serpentine flexure springs for a larger rotational angle, and symmetric spring arrangement for a higher radial shock resistance. A rotation of a tilted reflective mirror was used to further enhance the optical attenuation of VOA. The actuator, proposed with the size of 2mm×2mm, achieved the bandwidth of 350Hz and the deflection angle of 2.5deg at 5V, resulting in the maximum attenuation of 57dB.

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© 2008 Society of Photo-Optical Instrumentation Engineers

Citation

Max Ti-Kuang Hou ; Jing-Yi Huang ; Shiue-Shr Jiang and J. Andrew Yeh
"In-plane rotary comb-drive actuator for a variable optical attenuator", J. Micro/Nanolith. MEMS MOEMS. 7(4), 043015 (November 06, 2008). ; http://dx.doi.org/10.1117/1.3013547


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