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Low-friction large step-size micromotor driven by a scratch-drive actuator with bounceback mechanism

[+] Author Affiliations
I-Yu Huang

National Sun Yat-Sen University, Department of Electrical Engineering, Kaohsiung 80424, Taiwan

Guan-Ming Chen

National Sun Yat-Sen University, Department of Electrical Engineering, Kaohsiung 80424, Taiwan

Yen-Chi Lee

National Sun Yat-Sen University, Department of Electrical Engineering, Kaohsiung 80424, Taiwan

J. Micro/Nanolith. MEMS MOEMS. 7(4), 043026 (November 12, 2008). doi:10.1117/1.3010878
History: Received June 18, 2008; Revised August 14, 2008; Accepted September 12, 2008; Published November 12, 2008
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This study presents a rotary micromotor with low-friction and large-step displacement driven by a scratch drive actuator (SDA) with bounceback driving mechanism. The present SDA device has a shorter plate and wider bushing compared to those of the existing SDA, resulting in a new electrostatic scratch-and-bounceback driving mechanism with larger stepping size. The new scratch-and-bounceback actuating mechanism markedly reduces the friction and damping effect between the SDA plate and the nitride insulator surface and eliminates effectively the sudden reverse rotation of SDA-based micro rotary motor. This investigation incorporated three design features (corners-rounded supporting-beam, flanged cover, and corrugated/ribbed/dimpled inside ring) into the structure of a SDA-based rotary micromotor to further decrease the rotating abrasion between the rotor inside ring and the cover, the anchor, and the inside rail. The bouncing SDA-based micromotors developed in this work (with 398μm diam) were fabricated using the MEMSCAP® Poly-MUMPs process and achieved many improvements, including low friction, large stepping size (196nm), small damping effect, and no sudden reverse rotation phenomenon (from dc to 25kHz).

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© 2008 Society of Photo-Optical Instrumentation Engineers

Citation

I-Yu Huang ; Guan-Ming Chen and Yen-Chi Lee
"Low-friction large step-size micromotor driven by a scratch-drive actuator with bounceback mechanism", J. Micro/Nanolith. MEMS MOEMS. 7(4), 043026 (November 12, 2008). ; http://dx.doi.org/10.1117/1.3010878


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