Special Section on Double-Patterning Lithography

Cure-induced photoresist distortions in double patterning

[+] Author Affiliations
Thomas I. Wallow, Mahidhar Rayasam

Advanced Micro Devices, One AMD Place, Sunnyvale, California 94088

Masanori Yamaguchi, Yohei Yamada

Ushio Incorporated, 1194 Sazuchi, Bessho-cho, Himeji, Hyogo Prefecture, Japan 6710224

Ryoung-han Kim, Jongwook Kye, Harry J. Levinson

Advanced Micro Devices, One AMD Place, Sunnyvale, California 94088

J. Micro/Nanolith. MEMS MOEMS. 8(1), 011010 (March 25, 2009). doi:10.1117/1.3094746
History: Received June 05, 2008; Revised December 03, 2008; Accepted January 14, 2009; Published March 25, 2009
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Many processes are under evaluation as simplifications to current double patterning methods. Reduction in process complexity and cost may be achieved by use of track-based photoresist stabilization methods that eliminate one etch step by allowing a second resist to be patterned over a first resist. Examples of stabilization methods using numerous curing processes have been reported. At least some resist shrinkage during stabilization appears to be generally observed for these methods. We evaluate the link between shrinkage and three-dimensional pattern distortions at line ends and elbow corners using experimental and simulation-based methods. A 172-nm UV resist curing process was used to produce controlled shrinkage ranging from 5% to 30%: shrinkage was correlated with resist distortions. At cure dose sufficient to stabilize the resist, shrinkage of approximately 23% results in measured line-end pullback and elbow displacement of approximately 16% and 13% of nominal linewidth respectively, when measured at resist half-height. Finite element analysis of resist beam structures produces shrinkage distortions that are in good qualitative and semiquantitative agreement with these measurements and thus appears to provide a provisionally general and useful method for predicting pattern distortions that arise during cure-based resist stabilization methods used in double imaging.

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© 2009 Society of Photo-Optical Instrumentation Engineers

Citation

Thomas I. Wallow ; Mahidhar Rayasam ; Masanori Yamaguchi ; Yohei Yamada ; Ryoung-han Kim, et al.
"Cure-induced photoresist distortions in double patterning", J. Micro/Nanolith. MEMS MOEMS. 8(1), 011010 (March 25, 2009). ; http://dx.doi.org/10.1117/1.3094746


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