Special Section on Theory and Practice of MEMS/NEMS/MOEMS, RF MEMS, and BioMEMS

Integrated microgiant electrorheological fluid valves for microflow cytometry

[+] Author Affiliations
Yun-Yang Ling

Hong Kong University of Science and Technology, Department of Mechanical Engineering, Clear Water Bay, Hong Kong

Yechi Zhang

Hong Kong University of Science and Technology, Department of Mechanical Engineering, Clear Water Bay, Hong Kong

Weijia Wen

Hong Kong University of Science and Technology, Department of Physics, Clear Water Bay, Hong Kong

Patrick Tabeling

École Supérieure de Physique et de Chimie Industrielle, Microfluidic MEMS and Nanostructures Laboratory, 10 rue Vauqueline, Paris, 75231, France

Yi-Kuen Lee

Hong Kong University of Science and Technology, Department of Mechanical Engineering, Clear Water Bay, Hong Kong

J. Micro/Nanolith. MEMS MOEMS. 8(2), 021103 (May 05, 2009). doi:10.1117/1.3124191
History: Received August 20, 2008; Revised February 05, 2009; Accepted March 17, 2009; Published May 05, 2009
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We present the fabrication and optimization of new integrated microgiant electrorheological (GER) valves for microflow cytometry. Compared to previous GER valves, new GER valves, consisting of an SU-8 layer, a PDMS membrane, and glass layers, were fabricated by 4-mask microelectromechanical systems technology and two new packaging methods. This design enabled good bonding and fluidic interconnection. The thickness of the PDMS membrane was designed such that the membrane deformation was large enough that the cytometry channel was well sealed. The interfacial stress between the PDMS and the PDMS/SU-8 as a function of vacuum plasma treatment time was investigated in detail. The switching behavior of the GER valves was also analyzed and characterized using fluorescence microscopy.

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© 2009 Society of Photo-Optical Instrumentation Engineers

Citation

Yun-Yang Ling ; Yechi Zhang ; Weijia Wen ; Patrick Tabeling and Yi-Kuen Lee
"Integrated microgiant electrorheological fluid valves for microflow cytometry", J. Micro/Nanolith. MEMS MOEMS. 8(2), 021103 (May 05, 2009). ; http://dx.doi.org/10.1117/1.3124191


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