Special Section on Theory and Practice of MEMS/NEMS/MOEMS, RF MEMS, and BioMEMS

Deep nickel metal deposition on multiscale feature sizes of a small hole and large sector cavities using electroforming

[+] Author Affiliations
Chen-Kuei Chung

National Cheng Kung University, Department of Mechanical Engineering, Center for Micro/Nano Science and Technology, Tainan, Taiwan 70101

Wei-Tse Chang

National Cheng Kung University, Department of Mechanical Engineering, Center for Micro/Nano Science and Technology, Tainan, Taiwan 70101

J. Micro/Nanolith. MEMS MOEMS. 8(2), 021111 (April 10, 2009). doi:10.1117/1.3116126
History: Received August 14, 2008; Revised February 12, 2009; Accepted February 18, 2009; Published April 10, 2009
Text Size: A A A

The deep nickel metal deposition on multiscale features with a single small hole and large sector cavities with depth of 1mm has been investigated using direct current (DC) and pulse alternating current (AC) electroforming. The diameter of the hole is around 240μm, and the size of the sector cavity is several mm to cm corresponding to the various aspect ratios from 0.07 to 4.17. The successful metal electroforming into both the hole and cavity features can be obtained by the AC mode, while the DC mode leads to metal electroforming only in sector cavities rather than in the small hole. This is because the surface concentration of the cathode in pulse electroforming is higher than that in DC electroforming, allowing large cations to diffuse into different multiscale features at lower overpotential. The increment factor, i.e., percentage increase in concentration used as an index of the varied surface concentration increases from 0.903 (102%) at 1Hz to 1.077 (102%) at 100Hz. This achievement can be used for the high aspect ratio metal electroforming of a single hole as a micro-sensing tip in different applications.

Figures in this Article
© 2009 Society of Photo-Optical Instrumentation Engineers

Topics

Metals ; Nickel

Citation

Chen-Kuei Chung and Wei-Tse Chang
"Deep nickel metal deposition on multiscale feature sizes of a small hole and large sector cavities using electroforming", J. Micro/Nanolith. MEMS MOEMS. 8(2), 021111 (April 10, 2009). ; http://dx.doi.org/10.1117/1.3116126


Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

PubMed Articles
Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.