Special Section on Theory and Practice of MEMS/NEMS/MOEMS, RF MEMS, and BioMEMS

Vertical electrothermal actuator with separated metal and nitride structural layers

[+] Author Affiliations
Jui-che Tsai

National Taiwan University, Graduate Institute of Photonics and Optoelectronics, Department of Electrical Engineering, No. 1, Sec 4, Roosevelt Road, Taipei 10617, Taiwan

Ren-Jie Lai

National Taiwan University, Graduate Institute of Photonics and Optoelectronics, Department of Electrical Engineering, No. 1, Sec 4, Roosevelt Road, Taipei 10617, Taiwan

Chun-Yi Yin

National Taiwan University, Graduate Institute of Photonics and Optoelectronics, Department of Electrical Engineering, No. 1, Sec 4, Roosevelt Road, Taipei 10617, Taiwan

Dian-Sheng Chen

National Taiwan University, Graduate Institute of Photonics and Optoelectronics, Department of Electrical Engineering, No. 1, Sec 4, Roosevelt Road, Taipei 10617, Taiwan

Ching-Kai Shen

National Taiwan University, Graduate Institute of Photonics and Optoelectronics, Department of Electrical Engineering, No. 1, Sec 4, Roosevelt Road, Taipei 10617, Taiwan

Yao-Tien Chang

National Taiwan University, Graduate Institute of Photonics and Optoelectronics, Department of Electrical Engineering, No. 1, Sec 4, Roosevelt Road, Taipei 10617, Taiwan

J. Micro/Nanolith. MEMS MOEMS. 8(2), 021114 (April 13, 2009). doi:10.1117/1.3100208
History: Received August 13, 2008; Revised December 08, 2008; Accepted January 28, 2009; Published April 13, 2009
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We report on a novel low-power, large-displacement, vertical electrothermal actuator made of multiple materials, primarily silicon nitride, polysilicon, and nickel. The architecture of separated metal and nitride layers bypasses the limitation imposed by conventional bimorph actuators. A vertical tip displacement of 20μm can be achieved at a driving current as low as 1.06mA. The corresponding power consumption is 16.29mW. Devices with different combinations of parameter values are characterized and compared. At the end of the work, we compare our device with several selections from the archives.

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© 2009 Society of Photo-Optical Instrumentation Engineers

Citation

Jui-che Tsai ; Ren-Jie Lai ; Chun-Yi Yin ; Dian-Sheng Chen ; Ching-Kai Shen, et al.
"Vertical electrothermal actuator with separated metal and nitride structural layers", J. Micro/Nanolith. MEMS MOEMS. 8(2), 021114 (April 13, 2009). ; http://dx.doi.org/10.1117/1.3100208


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