Special Section on Theory and Practice of MEMS/NEMS/MOEMS, RF MEMS, and BioMEMS

Heat micromanipulation of micro-objects and micro-organisms using a novel Peltier device

[+] Author Affiliations
Toru Anzai

Kanagawa University, Department of Electrical, Electronic and Information Engineering, 3-27-1 Rokkakubashi, Kanagawa-ku, Yokohama 221-8686, Japan

Shigeo Yamaguchi

Kanagawa University, Department of Electronics, Informatics, and Frontiers and High-Tech Research Center, 3-27-1 Rokkakubashi, Kanagawa-ku, Yokohama 221-8686, Japan

J. Micro/Nanolith. MEMS MOEMS. 8(2), 021115 (June 05, 2009). doi:10.1117/1.3151998
History: Received August 14, 2008; Revised March 31, 2009; Accepted April 07, 2009; Published June 05, 2009
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A novel thermoelectric cooling/heating device was proposed and fabricated as an alternative to the conventional π-type device. The novel device is the first since the conventional π-type structure was fabricated a half-century ago. The structure includes a sharp tip that is positioned between p- and n-type Bi2Te3 bulks, and the tip can easily be exchanged when different targets are cooled or heated. The tip sizes are 50100μm when a copper tip is used and 100nm when a cantilever is used. The tip temperature reached 36.3°C during cooling and 251.5°C during heating. Our device is useful not only for cooling/heating micro-objects but also for heat manipulation of micro-organisms.

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© 2009 Society of Photo-Optical Instrumentation Engineers

Citation

Toru Anzai and Shigeo Yamaguchi
"Heat micromanipulation of micro-objects and micro-organisms using a novel Peltier device", J. Micro/Nanolith. MEMS MOEMS. 8(2), 021115 (June 05, 2009). ; http://dx.doi.org/10.1117/1.3151998


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