Special Section on Theory and Practice of MEMS/NEMS/MOEMS, RF MEMS, and BioMEMS

Silicon carbide resonant tuning fork for microsensing applications in high-temperature and high G-shock environments

[+] Author Affiliations
David R. Myers

University of California, Berkeley, Berkeley Sensor and Actuator Center, Department of Mechanical Engineering, Berkeley, California 94720

Kan Bun Cheng

University of California, Berkeley, Berkeley Sensor and Actuator Center, Department of Mechanical Engineering, Berkeley, California 94720

Babak Jamshidi

University of California, Berkeley, Berkeley Sensor and Actuator Center, Department of Mechanical Engineering, Berkeley, California 94720

Robert G. Azevedo

University of California, Berkeley, Berkeley Sensor and Actuator Center, Department of Mechanical Engineering, Berkeley, California 94720

Debbie G. Senesky

University of California, Berkeley, Berkeley Sensor and Actuator Center, Department of Mechanical Engineering, Berkeley, California 94720

Li Chen

Case Western Reserve University, Department of Electrical Engineering and Computer Science, Cleveland, Ohio 44106

Mehran Mehregany

Case Western Reserve University, Department of Electrical Engineering and Computer Science, Cleveland, Ohio 44106

Muthu B. J. Wijesundara

University of California, Berkeley, Berkeley Sensor and Actuator Center, Department of Mechanical Engineering, Berkeley, California 94720

Albert P. Pisano

University of California, Berkeley, Berkeley Sensor and Actuator Center, Department of Mechanical Engineering, Berkeley, California 94720

J. Micro/Nanolith. MEMS MOEMS. 8(2), 021116 (May 29, 2009). doi:10.1117/1.3143192
History: Received August 15, 2008; Revised March 10, 2009; Accepted April 13, 2009; Published May 29, 2009
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We present the fabrication and testing of a silicon carbide balanced mass double-ended tuning fork that survives harsh environments without compromising the device strain sensitivity and resolution bandwidth. The device features a material stack that survives corrosive environments and enables high-temperature operation. To perform high-temperature testing, a specialized setup was constructed that allows the tuning fork to be characterized using traditional silicon electronics. The tuning fork has been operated at 600°C in the presence of dry steam for short durations. This tuning fork has also been tested to 64,000G using a hard-launch, soft-catch shock implemented with a light gas gun. However, the device still has a strain sensitivity of 66Hzμϵ and strain resolution of 0.045μϵ in a 10-kHz bandwidth. As such, this balanced-mass double-ended tuning fork can be used to create a variety of different sensors including strain gauges, accelerometers, gyroscopes, and pressure transducers. Given the adaptable fabrication process flow, this device could be useful to microelectromechanical systems (MEMS) designers creating sensors for a variety of different applications.

Figures in this Article
© 2009 Society of Photo-Optical Instrumentation Engineers

Citation

David R. Myers ; Kan Bun Cheng ; Babak Jamshidi ; Robert G. Azevedo ; Debbie G. Senesky, et al.
"Silicon carbide resonant tuning fork for microsensing applications in high-temperature and high G-shock environments", J. Micro/Nanolith. MEMS MOEMS. 8(2), 021116 (May 29, 2009). ; http://dx.doi.org/10.1117/1.3143192


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