Special Section on Theory and Practice of MEMS/NEMS/MOEMS, RF MEMS, and BioMEMS

Fabrication of novel silicon dual atomic force microscope tip with narrow gap

[+] Author Affiliations
Shinji Morita

Hirosaki University, Graduate School of Science and Technology, 3 Bunkyo-cho, Hirosaki, Aomori 036-8561, Japan

Takashi Mineta

Hirosaki University, Graduate School of Science and Technology, 3 Bunkyo-cho, Hirosaki, Aomori 036-8561, Japan

Eiji Makino

Hirosaki University, Graduate School of Science and Technology, 3 Bunkyo-cho, Hirosaki, Aomori 036-8561, Japan

Akihiro Umino

Hirosaki University, Graduate School of Science and Technology, 3 Bunkyo-cho, Hirosaki, Aomori 036-8561, Japan

Takahiro Kawashima

Toyohashi University of Technology, 1-1 Hibarigaoka, Tempaku-cho, Toyohashi 441-8580, Japan

Takayuki Shibata

Toyohashi University of Technology, 1-1 Hibarigaoka, Tempaku-cho, Toyohashi 441-8580, Japan

J. Micro/Nanolith. MEMS MOEMS. 8(2), 021117 (June 09, 2009). doi:10.1117/1.3142970
History: Received August 11, 2008; Revised February 18, 2009; Accepted April 15, 2009; Published June 09, 2009
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We propose a novel fabrication process for twin probes of an atomic force microscope (AFM) that consist of a silicon dual tip with a narrow gap. The dual tip with a tetrahedral shape consists of an inclined silicon (111) plane and two vertical planes and was successfully fabricated by using the proposed fabrication process of combining deep reactive ion etching (D-RIE) for silicon trench formation along the silicon (001) direction, selective oxidation of the sidewalls of the trench, and crystalline anisotropic etching. The silicon tips could be sharpened by a low-temperature oxidation process, resulting in a tip radius of about 10nm. In addition, the dual silicon tip formation, dual AFM probe with cantilever, and thermal actuator were also successfully fabricated from a silicon-on-insulator (SOI) water. The gap of the dual tip was about 2.9μm, with trench etching 1μm wide and sidewall oxidation 1μm thick.

Figures in this Article
© 2009 Society of Photo-Optical Instrumentation Engineers

Citation

Shinji Morita ; Takashi Mineta ; Eiji Makino ; Akihiro Umino ; Takahiro Kawashima, et al.
"Fabrication of novel silicon dual atomic force microscope tip with narrow gap", J. Micro/Nanolith. MEMS MOEMS. 8(2), 021117 (June 09, 2009). ; http://dx.doi.org/10.1117/1.3142970


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