Development of 2.4-GHz film bulk acoustic wave filter for wireless communication

Chi-Ming Fang; Shih-Yung Pao; Chi-Yuan Lee; Yi-Chang Lu; Pei-Yen Chen; Yung-Chung Chin; Pei-Zen Chang

doi:10.1117/1.3094749

1 April 2009 Development of 2.4-GHz film bulk acoustic wave filter for wireless communication

Chi-Ming Fang, Shih-Yung Pao, Chi-Yuan Lee, Yi-Chang Lu, Pei-Yen Chen, Yung-Chung Chin, Pei-Zen Chang

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 8, Issue 2, 021121 (April 2009). https://doi.org/10.1117/1.3094749

Abstract

This research shows the realization of 2.4-GHz film bulk acoustic wave (FBAW) filters. The design, simulation, fabrication, measurement, and analysis of the film bulk acoustic wave resonator (FBAR) devices are covered, which is helpful for the manufacture of the FBAR devices. The simulation of the FBAR and RF circuitry can be integrated on a single platform. The fabrication of the FBAW filters is compatible with complementary metal-oxide semiconductors. This device can be used in 2.4-GHz bandpass filters, such as 802.11b/g and Bluetooth. In this research, the 2.4-GHz FBAW filters for wireless communication have been accomplished. The fabricated FBAW filters have insertion loss of −10 dB, return loss of −7 dB, and stopband rejection of −25 dB, central frequency of 2.485 GHz, bandwidth of 60 MHz, and size of 0.5 mm×0.5 mm.

©(2009) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Chi-Ming Fang, Shih-Yung Pao, Chi-Yuan Lee, Yi-Chang Lu, Pei-Yen Chen, Yung-Chung Chin, and Pei-Zen Chang "Development of 2.4-GHz film bulk acoustic wave filter for wireless communication," Journal of Micro/Nanolithography, MEMS, and MOEMS 8(2), 021121 (1 April 2009). https://doi.org/10.1117/1.3094749

Published: 1 April 2009

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available