Special Section on Theory and Practice of MEMS/NEMS/MOEMS, RF MEMS, and BioMEMS

Ohmic series radio-frequency microelectromechanical system switch with corrugated diaphragm

[+] Author Affiliations
Feixiang Ke

Nanyang Technological University, Micromachines Centre, School of Mechanical and Aerospace Engineering, Singapore

Jianmin Miao

Nanyang Technological University, Micromachines Centre, School of Mechanical and Aerospace Engineering, Singapore

Zhihong Wang

Nanyang Technological University, Micromachines Centre, School of Mechanical and Aerospace Engineering, Singapore

J. Micro/Nanolith. MEMS MOEMS. 8(2), 021122 (April 03, 2009). doi:10.1117/1.3100204
History: Received August 15, 2008; Revised November 26, 2008; Accepted December 02, 2008; Published April 03, 2009
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We present an ohmic series radio-frequency microelectromechanical system (RF MEMS) switch based on a moveable corrugated diaphragm that activates switch contact. Corrugation technology is introduced in the SiO2Si3N4 diaphragm for reducing the residual stress in the diaphragm. Moreover, a multilayer metallization system containing ruthenium/gold is proposed as a contact metal to address the reliability of the switch contact. The concept of the corrugated diaphragm, together with a ruthenium/gold contact-metal system, is proven by the characterization of fabricated RF MEMS switches to be an effective way to realize reliable electric contact with significantly reduced pull-in voltage. The durability of the switch contact is increased significantly with the introduction of the multilayer metal, compared to a pure gold contact.

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© 2009 Society of Photo-Optical Instrumentation Engineers

Citation

Feixiang Ke ; Jianmin Miao and Zhihong Wang
"Ohmic series radio-frequency microelectromechanical system switch with corrugated diaphragm", J. Micro/Nanolith. MEMS MOEMS. 8(2), 021122 (April 03, 2009). ; http://dx.doi.org/10.1117/1.3100204


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