Ohmic series radio-frequency microelectromechanical system switch with corrugated diaphragm

Feixiang Ke; Jianmin Miao; Zhihong Wang

doi:10.1117/1.3100204

1 April 2009 Ohmic series radio-frequency microelectromechanical system switch with corrugated diaphragm

Feixiang Ke, Jianmin Miao, Zhihong Wang

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 8, Issue 2, 021122 (April 2009). https://doi.org/10.1117/1.3100204

Abstract

We present an ohmic series radio-frequency microelectromechanical system (RF MEMS) switch based on a moveable corrugated diaphragm that activates switch contact. Corrugation technology is introduced in the SiO₂/Si3N₄ diaphragm for reducing the residual stress in the diaphragm. Moreover, a multilayer metallization system containing ruthenium/gold is proposed as a contact metal to address the reliability of the switch contact. The concept of the corrugated diaphragm, together with a ruthenium/gold contact-metal system, is proven by the characterization of fabricated RF MEMS switches to be an effective way to realize reliable electric contact with significantly reduced pull-in voltage. The durability of the switch contact is increased significantly with the introduction of the multilayer metal, compared to a pure gold contact.

©(2009) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Feixiang Ke, Jianmin Miao, and Zhihong Wang "Ohmic series radio-frequency microelectromechanical system switch with corrugated diaphragm," Journal of Micro/Nanolithography, MEMS, and MOEMS 8(2), 021122 (1 April 2009). https://doi.org/10.1117/1.3100204

Published: 1 April 2009

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