Special Section on Theory and Practice of MEMS/NEMS/MOEMS, RF MEMS, and BioMEMS

Experiments and results of the silicon micromachined gyroscope

[+] Author Affiliations
Fu-Xue Zhang

Beijing Information Science and Technology University, Research Centre of Sensor Technology, No. 35 North Fourth Ring Middle Road, Chaoyang District, Beijing, China and Beijing University of Posts and Telecommunications, School of Electronic and Engineering, No. 10 Xitucheng Road, Haidian District, Beijing, China

Qing-Wen Yan

Beijing Information Science and Technology University, Research Centre of Sensor Technology, No. 35 North Fourth Ring Middle Road, Chaoyang District, Beijing, China and Beijing University of Posts and Telecommunications, School of Electronic and Engineering, No. 10 Xitucheng Road, Haidian District, Beijing, China

Wei Zhang

Beijing Information Science and Technology University, Research Centre of Sensor Technology, No. 35 North Fourth Ring Middle Road, Chaoyang District, Beijing, China and Beijing University of Posts and Telecommunications, School of Electronic and Engineering, No. 10 Xitucheng Road, Haidian District, Beijing, China

J. Micro/Nanolith. MEMS MOEMS. 8(2), 021130 (April 20, 2009). doi:10.1117/1.3122366
History: Received August 15, 2008; Revised February 14, 2009; Accepted March 05, 2009; Published April 20, 2009
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We report a multifunctional silicon micromachined gyroscope. The gyroscope can sense the rolling, yawing, and pitching angular velocity synchronously. Both the principle and the experiment of the gyroscope are presented to explain the multifunction. We also discuss the way to determine the deflecting direction and deflecting position of the rotating carrier in the gravitation field.

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© 2009 Society of Photo-Optical Instrumentation Engineers

Citation

Fu-Xue Zhang ; Qing-Wen Yan and Wei Zhang
"Experiments and results of the silicon micromachined gyroscope", J. Micro/Nanolith. MEMS MOEMS. 8(2), 021130 (April 20, 2009). ; http://dx.doi.org/10.1117/1.3122366


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