Special Section on Theory and Practice of MEMS/NEMS/MOEMS, RF MEMS, and BioMEMS

Design and simulation of miniature ribbon microphones

[+] Author Affiliations
Ming-Li Ke

National Chung Hsing University, Institute of Precision Engineering, Taichung, Taiwan

Ray-Hua Horng

National Chung Hsing University, Institute of Precision Engineering, Taichung, Taiwan

Yao-Cheng Tsai

National Chung Hsing University, Institute of Precision Engineering, Taichung, Taiwan

Guan-Wei Chen

National Chung Hsing University, Institute of Precision Engineering, Taichung, Taiwan

Chao-Chih Chang

Taiwan Carol Electronics Company, Ltd., No. 202, Tung Kuang Road, Taichung, Taiwan

J. Micro/Nanolith. MEMS MOEMS. 8(2), 021160 (June 09, 2009). doi:10.1117/1.3142971
History: Received August 20, 2008; Revised January 09, 2009; Accepted April 15, 2009; Published June 09, 2009
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Traditional ribbon microphones cannot be miniaturized owing to the sensitivity of the microphone in proportion to its ribbon length. A novel symmetrical voice coil instead of the traditional ribbon is proposed, designed, and optimized. The new structure of ribbon microphones was fabricated by microelectromechanical systems (MEMS) technology, which allows increasing the effective coil length while reducing the diaphragm dimension. The obtained results present a voice coil length of 77.5mm under a limited ribbon length of 17mm. Compared with the conventional ribbon microphones (with ribbon length 50mm and voice coil length 50mm), the diaphragm dimension was reduced but its effective length was increased by about 55%, from 50mmto77.5mm. Moreover, the magnetic flux density in the air gap of the magnetic circuit by simulations and experiments is measured to be at 5.1 and 5kG, respectively.

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© 2009 Society of Photo-Optical Instrumentation Engineers

Citation

Ming-Li Ke ; Ray-Hua Horng ; Yao-Cheng Tsai ; Guan-Wei Chen and Chao-Chih Chang
"Design and simulation of miniature ribbon microphones", J. Micro/Nanolith. MEMS MOEMS. 8(2), 021160 (June 09, 2009). ; http://dx.doi.org/10.1117/1.3142971


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