Special Section on Theory and Practice of MEMS/NEMS/MOEMS, RF MEMS, and BioMEMS

Research of radioisotope microbattery based on β-radio-voltaic effect

[+] Author Affiliations
Jinkui Chu

Ministry of Education, Key Laboratory for Precision and Nontraditional Machining Technology and Dalian University of Technology, Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian 116023, China

Xianggao Piao

Ministry of Education, Key Laboratory for Precision and Nontraditional Machining Technology and Dalian University of Technology, Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian 116023, China

Limin Jian, Hui Lin

Beijing Atom HighTech Company Ltd., Beijing 102413, China

J. Micro/Nanolith. MEMS MOEMS. 8(2), 021180 (June 05, 2009). doi:10.1117/1.3152000
History: Received August 01, 2008; Revised April 15, 2009; Accepted April 22, 2009; Published June 05, 2009
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With the development of MEMS, micropower has gradually become one of the essential problems in MEMS applications. The structure of the selective emitter radioisotope microbattery is investigated in detail. The working principle of a radioisotope microbattery is discussed at first. Then the design of the radioisotope microbattery is proposed around the aspects of shape structure and doping mode. Next, a prototype of the radioisotope microbattery in three different shape structures with two doping modes is fabricated. Finally, the prototype of the radioisotope microbattery is tested at Beijing Atom HighTech Incorporated. After comparing the selective emitter radioisotope (SER) microbattery and back surface field (BSF) microbattery, the results indicate the characteristic of the SER microbattery has better performance with the type of inverted pyramid array and V channel array.

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© 2009 Society of Photo-Optical Instrumentation Engineers

Citation

Jinkui Chu ; Xianggao Piao ; Limin Jian and Hui Lin
"Research of radioisotope microbattery based on β-radio-voltaic effect", J. Micro/Nanolith. MEMS MOEMS. 8(2), 021180 (June 05, 2009). ; http://dx.doi.org/10.1117/1.3152000


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