Special Section on Theory and Practice of MEMS/NEMS/MOEMS, RF MEMS, and BioMEMS

Electromechanical modeling, characterization, and optimization design of the postcomplementary metal-oxide-semiconductor capacitive microarrayed ultrasonic transducer

[+] Author Affiliations
De-Yi Chiou

Industrial Technology Research Institute, Identification and Security Technology Center, D000, ISTC/ITRI, Room 217, Building 52, 195, Section 4, Chung Hsing Road, Chutung, Hsinchu, Taiwan 310

Mu-Yueh Chen

Industrial Technology Research Institute, Identification and Security Technology Center, D000, ISTC/ITRI, Room 217, Building 52, 195, Section 4, Chung Hsing Road, Chutung, Hsinchu, Taiwan 310

J. Micro/Nanolith. MEMS MOEMS. 8(2), 021190 (June 09, 2009). doi:10.1117/1.3152235
History: Received August 14, 2008; Revised April 22, 2009; Accepted May 04, 2009; Published June 09, 2009
Text Size: A A A

In this study, an electromechanical modeling technique for characterization and optimization design of the postcomplementary-metal-oxide-semiconductor (pCMOS) capacitive microarrayed ultrasonic transducer (CMUT) is presented. A two-dimensional, axisymmetric finite element model is developed using the ANSYS parametric design language. Electromechanical simulations are performed to investigate the fundamental characteristics of the CMUT, such as collapse voltage, resonant frequency, capacitance, and electromechanical coupling coefficient. Both the numerical and analytical (experimental) results agree well to show the validity of the proposed approach. The study of the influence of each defined parameter on the collapse voltage and resonant frequency is also presented. An integrated design approach that couples the genetic algorithm (GA) with the commercial finite element method (FEM) software ANSYS is developed to obtain the best design parameters. The optimal results show that the design objective with the equality constraint, which are to minimize the collapse voltage while simultaneously achieving the customized resonant frequency, are satisfied. From the presented results, it is concluded that the GA/FEM coupling approach provides another useful numerical tool for multiobjective design of the pCMOS-CMUT.

© 2009 Society of Photo-Optical Instrumentation Engineers

Citation

De-Yi Chiou and Mu-Yueh Chen
"Electromechanical modeling, characterization, and optimization design of the postcomplementary metal-oxide-semiconductor capacitive microarrayed ultrasonic transducer", J. Micro/Nanolith. MEMS MOEMS. 8(2), 021190 (June 09, 2009). ; http://dx.doi.org/10.1117/1.3152235


Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

PubMed Articles
Advertisement


 

  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.