Special Section on Reliability, Packaging, Testing, and Characterization of MEMS and MOEMS

Wireless surface acoustic wave chemical sensor for simultaneous measurement of CO2 and humidity

[+] Author Affiliations
Wen Wang

Ajou University, Division of Electronics Engineering, Suwon, 443-749, South Korea and Chinese Academy of Sciences, Institute of Acoustics, Beijing, 100-190, China

Chunbae Lim, Keekeun Lee, Sangsik Yang

Ajou University, Division of Electronics Engineering, Suwon, 443-749, South Korea

J. Micro/Nanolith. MEMS MOEMS. 8(3), 031306 (July 02, 2009). doi:10.1117/1.3158610
History: Received May 22, 2008; Revised March 23, 2009; Accepted April 01, 2009; Published July 02, 2009
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A 440-MHz wireless and passive surface acoustic wave (SAW) microsensor was developed for simultaneous measurement of CO2 and relative humidity (RH). The developed SAW microsensor was composed of SAW reflective delay lines structured by an interdigital transducer (IDT) and several shorted grating reflectors, CO2, and water vapor-sensitive films. A theoretical model was established to predict the response mechanism of the polymer-coated SAW gas sensor. Infusion of CO2 into the chamber and humidity changes induced large phase shifts in the reflection peaks. Good linearity and repeatability were observed in the CO2 concentration of 0400ppm and 2080% RH. The obtained sensitivity was 2°ppm1 for CO2 detection and 7.45°/%RH for humidity sensing. Temperature and humidity effects were also investigated during the sensitivity evaluation process.

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© 2009 Society of Photo-Optical Instrumentation Engineers

Citation

Wen Wang ; Chunbae Lim ; Keekeun Lee and Sangsik Yang
"Wireless surface acoustic wave chemical sensor for simultaneous measurement of CO2 and humidity", J. Micro/Nanolith. MEMS MOEMS. 8(3), 031306 (July 02, 2009). ; http://dx.doi.org/10.1117/1.3158610


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