Special Section on Reliability, Packaging, Testing, and Characterization of MEMS and MOEMS

4096-element continuous face-sheet MEMS deformable mirror for high-contrast imaging

[+] Author Affiliations
Steven A. Cornelissen

Boston Micromachines Corporation, 30 Spinelli Place, Cambridge, Massachusetts 02138

Paul A. Bierden

Boston Micromachines Corporation, 30 Spinelli Place, Cambridge, Massachusetts 02138

Thomas G. Bifano

Boston Micromachines Corporation, 30 Spinelli Place, Cambridge, Massachusetts 02138 and Boston University Photonics Center, 8 Saint Mary’s Street, Boston, Massachusetts 02215

Charlie V. Lam

Boston Micromachines Corporation, 30 Spinelli Place, Cambridge, Massachusetts 02138

J. Micro/Nanolith. MEMS MOEMS. 8(3), 031308 (July 29, 2009). doi:10.1117/1.3158067
History: Received March 09, 2009; Revised April 28, 2009; Accepted April 30, 2009; Published July 29, 2009
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We present the progress in the development of a 4096-element microelectromechanical systems (MEMS) deformable mirror, fabricated using polysilicon surface micromachining manufacturing processes, with 4μm of stroke, a surface finish of <10nm rms, a fill factor of 99.5%, and a bandwidth of >5kHz. The packaging and high-speed drive electronics for this device, capable of frame rates of 22kHz, are also presented.

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© 2009 Society of Photo-Optical Instrumentation Engineers

Citation

Steven A. Cornelissen ; Paul A. Bierden ; Thomas G. Bifano and Charlie V. Lam
"4096-element continuous face-sheet MEMS deformable mirror for high-contrast imaging", J. Micro/Nanolith. MEMS MOEMS. 8(3), 031308 (July 29, 2009). ; http://dx.doi.org/10.1117/1.3158067


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