Special Section on Computational Lithography

Aerial image back propagation with two-dimensional transmission cross coefficient

[+] Author Affiliations
Kenji Yamazoe, Yoshiyuki Sekine, Tokuyuki Honda

Canon Inc., 23-10, Kiyohara-Kogyo-danchi, Utsunomiya, Tochigi, 321-3298, Japan

J. Micro/Nanolith. MEMS MOEMS. 8(3), 031406 (August 25, 2009). doi:10.1117/1.3206980
History: Received December 01, 2008; Revised June 26, 2009; Accepted June 30, 2009; Published August 25, 2009
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We present the basic concept of a fast mask optimization method that utilizes target-intensity back propagation. This method decomposes the target-intensity using a two-dimensional (2-D) transmission cross coefficient. After applying normal incidence approximation to the decomposed target intensity, the spectrum of the mask is optimized in the pupil plane. Since the optimization is performed in the pupil plane, one can use relatively small sampling points, leading to a fast optimization. By setting a high-contrast target intensity, we can obtain an approximation of a phase shifting mask, whereas a low-contrast target intensity approximates a binary intensity mask or attenuated phase shifting mask.

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© 2009 Society of Photo-Optical Instrumentation Engineers

Citation

Kenji Yamazoe ; Yoshiyuki Sekine and Tokuyuki Honda
"Aerial image back propagation with two-dimensional transmission cross coefficient", J. Micro/Nanolith. MEMS MOEMS. 8(3), 031406 (August 25, 2009). ; http://dx.doi.org/10.1117/1.3206980


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