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Reinforced silicon neural microelectrode array fabricated using a commercial MEMS process

[+] Author Affiliations
Mohamad Hajj-Hassan

McGill University, Department of Electrical and Computer Engineering, 3480 University Street, Montreal, Quebec H3A2A7, Canada

Vamsy Chodavarapu

McGill University, Department of Electrical and Computer Engineering, 3480 University Street, Montreal, Quebec H3A2A7, Canada

Sam Musallam

McGill University, Department of Electrical and Computer Engineering, 3480 University Street, Montreal, Quebec, H3A2A7 and Department of Physiology, 3655 Promenade Sir William Osler, Montreal, Quebec H3G1Y6, Canada

J. Micro/Nanolith. MEMS MOEMS. 8(3), 033011 (July 23, 2009). doi:10.1117/1.3184795
History: Received February 10, 2009; Revised May 21, 2009; Accepted June 02, 2009; Published July 23, 2009
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We report the development of a silicon microelectrode array for brain machine interfaces and neural prosthesis fabricated in a commercial microelectromechanical systems (MEMS) process. We demonstrate high-aspect ratio silicon microelectrodes that reach 6.5mm in length while having only 10μm thickness. The fabrication of such elongated neural microelectrodes could lead to the development of cognitive neural prosthetics. Cognitive neural signals are higher level signals that contain information related to the goal of movements such as reaching and grasping and can be recorded from deeper regions of the brain such as the parietal reach region (PRR). We propose a new concept of reinforcing the regions of the electrodes that are more susceptible to breakage to withstand the insertion axial forces, retraction forces, and tension forces of the brain tissue during surgical implantation. We describe the design techniques, detailed analytical models, and simulations to develop reinforced silicon-based elongated neural electrodes. The electrodes are fabricated using the commercial MicraGem process from Micralyne, Inc. The use of a commercial MEMS fabrication process for silicon neural microelectrodes development yields low-cost, mass-producible, and well-defined electrode structures.

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© 2009 Society of Photo-Optical Instrumentation Engineers

Citation

Mohamad Hajj-Hassan ; Vamsy Chodavarapu and Sam Musallam
"Reinforced silicon neural microelectrode array fabricated using a commercial MEMS process", J. Micro/Nanolith. MEMS MOEMS. 8(3), 033011 (July 23, 2009). ; http://dx.doi.org/10.1117/1.3184795


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