Special Section on Extreme-Ultraviolet Lithography

Extreme ultraviolet lithography’s path to manufacturing

[+] Author Affiliations
Harry J. Levinson

GLOBALFOUNDRIES, 1050 Arques Avenue, Sunnyvale, California 94085

J. Micro/Nanolith. MEMS MOEMS. 8(4), 041501 (December 22, 2009). doi:10.1117/1.3273965
History: Received March 09, 2009; Revised September 01, 2009; Accepted October 21, 2009; Published December 22, 2009; January 29, 2009
Text Size: A A A

The origins of extreme ultraviolet (EUV) lithography and its progress toward readiness for manufacturing are recounted. Source power and reliability and mask defects are known items requiring additional improvement before EUV lithography will be suitable for use in the volume manufacturing of integrated circuits. Additional cycles of learning, as obtained from pilot line operation, will greatly accelerate the maturation of EUV lithography and enable its use in manufacturing as early as 2013.

Figures in this Article
© 2009 Society of Photo-Optical Instrumentation Engineers

Citation

Harry J. Levinson
"Extreme ultraviolet lithography’s path to manufacturing", J. Micro/Nanolith. MEMS MOEMS. 8(4), 041501 (December 22, 2009). ; http://dx.doi.org/10.1117/1.3273965


Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Journal Articles

Related Book Chapters

Topic Collections

PubMed Articles
Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.