The Selete full-field EUV exposure tool, EUV1, manufactured by Nikon, is being set up at Selete. Its lithographic performance was evaluated in exposure experiments with a static slit using line-and-space (L&S) patterns, Selete Standard Resist 03 (SSR3), a numerical aperture of 0.25, and conventional illumination . The results show that L&S patterns were resolved. Dynamic exposure experiments demonstrate that the resolution is across the exposure field. The CD uniformity across a shot is . Evaluation of the overlay performance of the EUV1 using alignment marks on a processed wafer revealed the repeatability to be better than . The overlay accuracy obtained with enhanced global alignment was less than after linear correction. These results show that the EUV1 has attained the quality level of a typical alpha-level lithography tool and is suitable for test site verification.