Articles

Feedback-stabilized deformable membrane mirrors for focus control

[+] Author Affiliations
Sarah J. Lukes

Montana State University, Department of Electrical and Computer Engineering, Bozeman, Montana 59717

Phillip A. Himmer

Montana State University, Department of Electrical and Computer Engineering, Bozeman, Montana 59717

Eric J. Moog

Montana State University, Department of Electrical and Computer Engineering, Bozeman, Montana 59717

Steven R. Shaw

Montana State University, Department of Electrical and Computer Engineering, Bozeman, Montana 59717

David L. Dickensheets

Montana State University, Department of Electrical and Computer Engineering, Bozeman, Montana 59717

J. Micro/Nanolith. MEMS MOEMS. 8(4), 043040 (October 27, 2009). doi:10.1117/1.3249659
History: Received July 16, 2009; Revised August 25, 2009; Accepted September 02, 2009; Published October 27, 2009
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This paper describes a method to extend the range of motion of a deformable, continuous membrane mirror beyond the limit of open-loop electrostatic instability through feedback control. The feedback scheme employs capacitive sensing directly at the mirror actuation electrodes and is based on frequency modulation of a coupled ring oscillator using a differential measurement technique. Analysis of the system shows that the range of stable deflection depends on the relative dynamics of the device and the feedback control circuitry. Experimental results demonstrate stable closed-loop deflection of our silicon nitride membrane test device to 69% of the air gap and confirm the dependence of the maximum stable displacement on overall loop dynamics.

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© 2009 Society of Photo-Optical Instrumentation Engineers

Citation

Sarah J. Lukes ; Phillip A. Himmer ; Eric J. Moog ; Steven R. Shaw and David L. Dickensheets
"Feedback-stabilized deformable membrane mirrors for focus control", J. Micro/Nanolith. MEMS MOEMS. 8(4), 043040 (October 27, 2009). ; http://dx.doi.org/10.1117/1.3249659


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