Articles

Gap regulation for suspended rotating disk used for microgyroscopes

[+] Author Affiliations
Nan-Chyuan Tsai

National Cheng Kung University, Department of Mechanical Engineering, Tainan 70101, Taiwan

Bing-Hong Liou

National Cheng Kung University, Department of Mechanical Engineering, Tainan 70101, Taiwan

Chih-Che Lin

National Cheng Kung University, Department of Mechanical Engineering, Tainan 70101, Taiwan

J. Micro/Nanolith. MEMS MOEMS. 8(4), 043045 (October 29, 2009). doi:10.1117/1.3256005
History: Received March 20, 2009; Accepted September 15, 2009; Published October 29, 2009
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An innovative magnetic module that is concurrently capable of performing as an actuator and a sensor is proposed and analyzed. The magnetic module is basically similar to a microscale linear variable differential transformer (LVDT), which is employed to actively adjust the height of a rotating seismic disk used in a gyroscope so that the pitch rate induced by Coriolis effect, due to exerted angular excitation, can be accurately measured. On one hand, the micromagnetic module acts like an actuator for height regulation on the seismic proof mass by applying appropriate electric current to the primary winding of the LVDT unit. On the other hand, the secondary winding pair of the LVDT acts like a sensor that can detect the gap change between the seismic rotating disk and the micromagnetic LVDT module, and the rotation speed (i.e., frequency) by the induced current.

© 2009 Society of Photo-Optical Instrumentation Engineers

Citation

Nan-Chyuan Tsai ; Bing-Hong Liou and Chih-Che Lin
"Gap regulation for suspended rotating disk used for microgyroscopes", J. Micro/Nanolith. MEMS MOEMS. 8(4), 043045 (October 29, 2009). ; http://dx.doi.org/10.1117/1.3256005


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