Articles

Analysis and fabrication of reciprocal motors applied for microgyroscopes

[+] Author Affiliations
Nan-Chyuan Tsai

National Cheng Kung University, Department of Mechanical Engineering, Tainan 70101, Taiwan

Jiun-Sheng Liou

National Cheng Kung University, Department of Mechanical Engineering, Tainan 70101, Taiwan

Chih-Che Lin

National Cheng Kung University, Department of Mechanical Engineering, Tainan 70101, Taiwan

Tuan Li

National Cheng Kung University, Department of Mechanical Engineering, Tainan 70101, Taiwan

J. Micro/Nanolith. MEMS MOEMS. 8(4), 043046 (December 15, 2009). doi:10.1117/1.3274611
History: Received June 04, 2009; Revised September 26, 2009; Accepted November 04, 2009; Published December 15, 2009; Online December 15, 2009
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For microgyroscopes, the angular rate detection components have to oscillate forward and backward, alternatively. An innovative design of a microelectromagnetic drive module is proposed to make a Π-type thin disk reciprocally and efficiently rotate within a certain of angular interval. Twelve electromagnetic (EM) poles, with iron cores at the center and wound by electroplated copper wires, enclosing the thin disk are designed to provide the magnetic drive power. An isotropic etching technique is employed to fabricate the high-aspect-ratio trench, housing of the follow-up electroplated copper, so that the contact angle of wire against the trench can be increased and the potential defect of cavities and pores within the wire can be prevented. On the other hand, a Π-type thin disk, with a central bearing and a set of auxiliary bushings, is designed to conduct the pitch motion as an angular excitation, in addition to spinning, is exerted on the gyroscope. That is, the angular motion of the disk is two-dimensional: spinning, driven by the EM poles, and tilting, to respond to the exerted angular rate due to Coriolis effect. The efficacy of the micromagnetic drive module is verified by theoretical analysis and computer simulations by the commercial software, Ansoft Maxewll. In comparison to the conventional planar windings in microscale systems, the magnetic drive force is increased by 150%.

© 2009 Society of Photo-Optical Instrumentation Engineers

Citation

Nan-Chyuan Tsai ; Jiun-Sheng Liou ; Chih-Che Lin and Tuan Li
"Analysis and fabrication of reciprocal motors applied for microgyroscopes", J. Micro/Nanolith. MEMS MOEMS. 8(4), 043046 (December 15, 2009). ; http://dx.doi.org/10.1117/1.3274611


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